Simulation andin situmonitoring of metallic contamination and surface roughening in wet wafer cleaning solutions

1995 ◽  
Vol 11 (1) ◽  
pp. 90-93 ◽  
Author(s):  
G. J. Norga ◽  
K. A. Black ◽  
H. M'saad ◽  
J. Michel ◽  
L. C. Kimerling
Keyword(s):  
Surface Roughening ◽  
Wafer Cleaning ◽  
Metallic Contamination

Observation of surface roughening on Cu(1, 1, 5)

1987 ◽  
Vol 48 (6) ◽  
pp. 1017-1028 ◽  
Author(s):  
F. Fabre ◽  
D. Gorse ◽  
B. Salanon ◽  
J. Lapujoulade
Keyword(s):  
Surface Roughening

scholarly journals (Ti,Al)O2 Whiskers Grown during Glow Discharge Nitriding of Ti-6Al-7Nb Alloy

Materials ◽  
2021 ◽  
Vol 14 (10) ◽  
pp. 2658
Author(s):  
Krzysztof Szymkiewicz ◽  
Jerzy Morgiel ◽  
Łukasz Maj ◽  
Małgorzata Pomorska
Keyword(s):  
Surface Hardening ◽  
Surface Defects ◽  
Plasma Nitriding ◽  
Surface Roughening ◽  
Effective Surface ◽  
Plan View ◽  
Gas Nitriding ◽  
Transmission Electron ◽  
Temperature Window ◽  
20 Nm

Plasma nitriding of titanium alloys is capable of effective surface hardening at temperatures significantly lower than gas nitriding, but at a cost of much stronger surface roughening. Especially interesting are treatments performed at the lower end of the temperature window used in such cases, as they are least damaging to highly polished parts. Therefore identifying the most characteristic defects is of high importance. The present work was aimed at identifying the nature of pin-point bumps formed at the glow discharged plasma nitrided Ti-6Al-7Nb alloy using plan-view scanning and cross-section transmission electron microscopy methods. It helped to establish that these main surface defects developed at the treated surface are (Ti,Al)O2 nano-whiskers of diameter from 20 nm to 40 nm, and length up to several hundreds of nanometers. The performed investigation confirmed that the surface imperfection introduced by plasma nitriding at the specified range should be of minor consequences to the mechanical properties of the treated material.

Effect of Dissolved Oxygen on Cu Corrosion in Single Wafer Cleaning Process

2009 ◽  
Vol 48 (4) ◽  
pp. 04C023 ◽  
Author(s):  
Masayoshi Imai ◽  
Yukinari Yamashita ◽  
Takashi Futatsuki ◽  
Morio Shiohara ◽  
Seiichi Kondo ◽  
...  
Keyword(s):  
Dissolved Oxygen ◽  
Cleaning Process ◽  
Wafer Cleaning ◽  
Cu Corrosion

The effect of ultrasonic impact treatment on surface roughening of commercially pure titanium during tensile test

2016 ◽  
Author(s):  
Anna Kozelskaya ◽  
Alexey Panin ◽  
Marina Kazachenok ◽  
Varvara Romanova ◽  
Yurii Pochivalov
Keyword(s):  
Tensile Test ◽  
Pure Titanium ◽  
Surface Roughening ◽  
Commercially Pure Titanium ◽  
Ultrasonic Impact Treatment ◽  
Commercially Pure

Submicron surface roughening of aliphatic polyamide 6,6 fabric through low temperature plasma and its effect on interfacial bonding in rubber composite

2017 ◽  
Vol 47 (8) ◽  
pp. 2029-2049 ◽  
Author(s):  
Siddhan Periyasamy ◽  
Krishna Prasad G ◽  
Raja ASM ◽  
Prashant G Patil
Keyword(s):  
Surface Roughness ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Plasma Treatment ◽  
Treatment Time ◽  
Surface Roughening ◽  
Temperature Plasma ◽  
Nylon 6,6 ◽  
Rubber Composite ◽  
Scanning Electron

The present study aims to produce submicron surface roughening of aliphatic polyamide 6,6 (nylon 6,6) fabric using dielectric barrier discharge-based atmospheric low temperature plasma for improving the adhesion bonding with rubber. The plasma treatment was done in the time ranging from 15 s to 300 s. Formation of surface roughness on the fabric due to plasma treatment and the associated chemical changes were studied through high-resolution scanning electron microscope, geometrical surface roughness by Kawabata evaluation system surface tester, contact angle measurements and Fourier transform infrared in Attenuated total reflectance mode. Scanning electron microscope micrographs revealed the presence of submicron roughness on the nylon 6,6 fibre surface with pores of around 100 nm (0.1 µm) for the optimum treatment time of 180 s above which the pore merging effect dominated resulting in the net low surface roughness. Geometrical roughness (SMD) results were also well in agreement with the scanning electron microscope results for the roughening and the optimum effect of the plasma treatment. The control and plasma treated nylon 6,6 samples were used as reinforcements for rubber composite. The peel strength of the rubber composite, which is a measure of interfacial bonding, increased to 150% as the maximum for the optimum plasma treatment time of 180 s. Intense rubber deposits over the 180 s plasma treated samples were observed while only a few deposits of rubber were observed on the control fabric when their interfaces were examined through scanning electron microscope after peeling test.

scholarly journals Epitaxy of diamond on Si(100) and surface-roughening-induced crystal misorientation

2001 ◽  
Vol 64 (24) ◽  
Author(s):  
X. Jiang ◽  
C. L. Jia ◽  
M. Szameitat ◽  
C. Rickers
Keyword(s):  
Surface Roughening
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