202 MD Simulations on Porosity and Mechanical Properties of Al Thin Film sputtered on Si Substrate
2000 ◽
Vol 2000.75
(0)
◽
pp. _2-3_-_2-4_
Keyword(s):
2001 ◽
Vol 44
(3)
◽
pp. 346-353
◽
1989 ◽
Vol 47
◽
pp. 562-563
Keyword(s):