Application of Modified Motional Mode Decoupling Control Scheme for a Fine-Motion Stage with Three-Degrees-of-Freedom.
2001 ◽
Vol 67
(658)
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pp. 1859-1866
Keyword(s):
1998 ◽
Vol 64
(9)
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pp. 1375-1379
Keyword(s):
2015 ◽
Vol 137
(7)
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2013 ◽
Vol 765-767
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pp. 1840-1843
2014 ◽
Vol 529
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pp. 534-538
2007 ◽
Vol 46
(20)
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pp. 6546-6557
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2018 ◽
Vol 2018
◽
pp. 1-9
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2018 ◽
Vol 1
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pp. 133-142
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