Oxidation Mechanism of Silicon Surface. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction.
2006 ◽
Vol 45
(9A)
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pp. 7063-7079
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1999 ◽
Vol 17
(4)
◽
pp. 1525
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1992 ◽
Vol 50
(2)
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pp. 1460-1461
1972 ◽
Vol 119
(6)
◽
pp. 772
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1993 ◽
Vol 11
(5)
◽
pp. 2676-2680
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1996 ◽
Vol 35
(Part 2, No. 12B)
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pp. L1695-L1698
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