High-Rate Reactive High-Power Impulse Magnetron Sputter Deposition: Principles and Applications

2016 ◽  
Keyword(s):  
High Power ◽  
Sputter Deposition ◽  
High Rate ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

CrNx films prepared using feedback-controlled high power impulse magnetron sputter deposition

2014 ◽  
Vol 32 (2) ◽  
pp. 02B115 ◽  
Author(s):  
Wan-Yu Wu ◽  
Bo-Hung Hsiao ◽  
Pin-Hung Chen ◽  
Wei-Chih Chen ◽  
Chun-Ta Ho ◽  
...  
Keyword(s):  
High Power ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

High rate reactive dc magnetron sputter deposition of Al2O3 films

1998 ◽  
Vol 16 (2) ◽  
pp. 639-643 ◽  
Author(s):  
M. Kharrazi Olsson ◽  
K. Macák ◽  
U. Helmersson ◽  
B. Hjörvarsson
Keyword(s):  
Sputter Deposition ◽  
High Rate ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Al2o3 Films

High rate reactive magnetron sputter deposition of titanium oxide

2008 ◽  
Vol 92 (22) ◽  
pp. 221501 ◽  
Author(s):  
T. Kubart ◽  
D. Depla ◽  
D. M. Martin ◽  
T. Nyberg ◽  
S. Berg
Keyword(s):  
Titanium Oxide ◽  
Sputter Deposition ◽  
High Rate ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization

2016 ◽  
Vol 119 (15) ◽  
pp. 155303 ◽  
Author(s):  
M. D. Tucker ◽  
R. Ganesan ◽  
D. G. McCulloch ◽  
J. G. Partridge ◽  
M. Stueber ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
High Power ◽  
Mixed Mode ◽  
Pulse Length ◽  
Sputter Deposition ◽  
Tetrahedral Amorphous Carbon ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature

Vacuum ◽  
2019 ◽  
Vol 169 ◽  
pp. 108884 ◽  
Author(s):  
Niklas Hellgren ◽  
Jimmy Thörnberg ◽  
Igor Zhirkov ◽  
Maurico A. Sortica ◽  
Ivan Petrov ◽  
...  
Keyword(s):  
Thin Films ◽  
High Power ◽  
Growth Temperature ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

High rate reactive magnetron sputter deposition of Al-doped ZnO with unipolar pulsing and impedance control system

2010 ◽  
Vol 28 (4) ◽  
pp. 890-894 ◽  
Author(s):  
Yasutaka Nishi ◽  
Kento Hirohata ◽  
Naoki Tsukamoto ◽  
Yasushi Sato ◽  
Nobuto Oka ◽  
...  
Keyword(s):  
Control System ◽  
Impedance Control ◽  
Sputter Deposition ◽  
High Rate ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Magnetron Sputter

High-rate dual-target d.c. magnetron sputter deposition of electrochromic MoO3 films

1997 ◽  
Vol 295 (1-2) ◽  
pp. 117-121 ◽  
Author(s):  
M. Kharrazi ◽  
A. Azens ◽  
L. Kullman ◽  
C.G. Granqvist
Keyword(s):  
Sputter Deposition ◽  
High Rate ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Dual Target

Energetic particle fluxes in magnetron sputter deposition of a-Si:H

1991 ◽  
Vol 137-138 ◽  
pp. 783-786 ◽  
Author(s):  
Alan M. Myers ◽  
James R. Doyle ◽  
G. Jeff Feng ◽  
Nagi Maley ◽  
David L. Ruzic ◽  
...  
Keyword(s):  
Energetic Particle ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Particle Fluxes
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