Controlling Sputter Processes by Optimizing Magnetic Filed Guidance and System Anode Interactions
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2010 ◽
Vol 130
(7)
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pp. 698-703
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1981 ◽
Vol 55
(2)
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pp. 406-408
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2009 ◽
Vol 319
(3-5)
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pp. 1107-1120
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2007 ◽
Vol 21
(08n09)
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pp. 1511-1518
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2018 ◽
Vol 14
(S345)
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pp. 255-256
1989 ◽
Vol 38
(11)
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pp. 1997-2007
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