A Study of UV/Ozone Cleaning Procedure for Silicon Surfaces

1989 ◽  
pp. 223-229
Author(s):  
S . Baunack ◽  
A. Zehe
1989 ◽  
Vol 115 (1) ◽  
pp. 223-227 ◽  
Author(s):  
S. Baunack ◽  
A. Zehe

2014 ◽  
Vol 55 ◽  
pp. 834-844 ◽  
Author(s):  
Anamaria Moldovan ◽  
Frank Feldmann ◽  
Georg Krugel ◽  
Martin Zimmer ◽  
Jochen Rentsch ◽  
...  
Keyword(s):  

CONCLUSION While cleaned silica-based glass surfaces have similar surface compositions, their susceptibility to strongly adsorbing organic contaminant s depends strongly on the glass composition and the cleaning procedure. For the three glass species exam-ined: silica, aluminoborosilicate, and sodalime glass , the glass surfaces behave similarly after chromic acid cleaning. They show significant differences in their properties followin g a dry cleaning procedure, such as pyrolysis or UV/ozone cleaning. The cleaned silica surfaces show a high susceptibility to adsorbing or-ganic contamination following pyrolysis cleaning, while the pyrolyzed sodalime glass appears to be virtually immune to strongly adsorbing organic molecules. Py-rolyzed aluminoborosilicate glass shows an intermediate susceptibility to adsorb-ing organic contaminants. The chromic acid cleaned glass surfaces all show an in-termediate susceptibility to contamination by adsorbed organic molecules. Thus, it may be an oversimplification to consider a clean glass surface as a high energy substrate that is bound to attract ambient organic contamination. The wettability behavior of the cleaned glass surfaces showed features associ-ated with their exposed chemical functions. The non-dispersive interaction energy between glass and water as a function of pH showed evidence of charging of the surface silanol groups. The point of zero charge for these surface chemical func-tions was observed at pH 3. An estimate of the non-dispersive interaction energy between glass and water at the point of zero charge enables a reasonable estima-tion of the density of surface silanol groups on the cleaned glass. The trends ob-served for the surface charge as a function of pH correlate with the observed sus-ceptibility for adsorbing organic contamination to the cleaned glass surfaces. Charge-adsorbed surfactant monolayers indicated a negative surface charge on the cleaned glass, as expected for silica-based glass surfaces at neutral pH. The wettability of grafted self-assembled octadecylsilane monolayers indicated high quality coatings on the cleaned glass surfaces. The coating quality was identical for all three glass species following chromic acid cleaning. The UV/ozone cleaned glass surfaces showed the highest coating quality on the silica surface, followed by the aluminoborosilicate surface and the sodalime glass surface. The trends in coating quality for all chromic acid cleaned surfaces and UV/ozone cleaned surfaces correlate with those seen for susceptibility to organic contamina-tion of the cleaned glass surfaces exposed to unpurified liquid octane. REFERENCES

2003 ◽  
pp. 114-116

1999 ◽  
Vol 569 ◽  
Author(s):  
T. Saitoh ◽  
D. Kobayashi ◽  
D. Kimura ◽  
K. Asai

ABSTRACTInitial oxidation process of silicon in UV/ozone ambient has been monitored using a multi-wavelength, in-situ spectroscopic ellipsometry. Ozone gas was chemically formed by photochemical reaction of oxygen under ulUmviolet illuimination. The oxide growth was monitored for hydrogenated silicon surfaces as functions of oxygen gas flow rate, gas pressure and wafer temperature. Initial oxidation rates were very high at almost all the temperatures. The oxidation rate was 0.2 nm/min about ten times higher than that for thermal oxidation without UV light at low temperatures. The accelerated oxidation was probably due to an electric field effect on the oxidation of back-bond silicon by active oxygen atoms included in the ozone gas.


2020 ◽  
Vol 64 (1-4) ◽  
pp. 1261-1268
Author(s):  
Shu Otani ◽  
Dang-Trang Nguyen ◽  
Kozo Taguchi

In this study, a portable and disposable paper-based microbial fuel cell (MFC) was fabricated. The MFC was powered by Rhodopseudomonas palustris bacteria (R. palustris). An activated carbon sheet-based anode pre-loaded organic matter (starch) and R. palustris was used. By using starch in the anode, R. palustris-loaded on the anode could be preserved for a long time in dry conditions. The MFC could generate electricity on-demand activated by adding water to the anode. The activated carbon sheet anode was treated by UV-ozone treatment to remove impurities and to improve its hydrophilicity before being loaded with R. palustris. The developed MFC could generate the maximum power density of 0.9 μW/cm2 and could be preserved for long-term usage with little performance degradation (10% after four weeks).


Author(s):  
Qiuwen Chen ◽  
Yanjun Ge ◽  
Jinyou Chai ◽  
Hailan Feng ◽  
Jianzhang Liu ◽  
...  

Elderly patients often find it challenging to remove plaque accumulated on the attachments of implant overdentures (IOD) using conventional cleaning instruments. Further, excessive plaque accumulation can lead to peri-implant diseases and occasionally to respiratory diseases. Therefore, here, we aimed to compare the effectiveness of waist-shaped interdental brushes (WIB) with that of straight-shaped ones (SIB) in plaque removal from the locator attachments of IOD. Twenty participants with two locator attachments retaining mandibular IOD participated in this study. After the baseline cleaning, the participants refrained from oral hygiene maintenance for 3 days. A dentist cleaned one of the attachments using the WIB and the other attachment using the SIB. The pre- and post-cleaning modified plaque index (mPLI) scores were recorded. Following another 3 days free from oral hygiene maintenance, the trained participants repeated the same cleaning procedure using the WIB and SIB. Pre- and post-cleaning mPLI scores were recorded. Regardless of the type of brush used, the post-cleaning mPLI scores were lower than the pre-cleaning ones. After the cleaning procedure, the overall mean mPLI score was lower in the WIB group than in the SIB group. The post-cleaning mPLI scores at the line-angles and on the axial surfaces of the attachments were also lower in the WIB group than in the SIB group. There was no difference in the cleaning effectiveness between the dentist and participants when they used the same type of interdental brush. The WIB was significantly more efficient in plaque removal than the SIB, especially at the line-angle sites.


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