In-Situ Observation of UV/Ozone Oxidation of Silicon using Spectroscopic Eli Psometry

1999 ◽  
Vol 569 ◽  
Author(s):  
T. Saitoh ◽  
D. Kobayashi ◽  
D. Kimura ◽  
K. Asai
Keyword(s):  
Gas Flow ◽  
Uv Light ◽  
Silicon Surfaces ◽  
In Situ Observation ◽  
Electric Field Effect ◽  
Initial Oxidation ◽  
Oxidation Rates ◽  
Almost All ◽  
Uv Ozone

ABSTRACTInitial oxidation process of silicon in UV/ozone ambient has been monitored using a multi-wavelength, in-situ spectroscopic ellipsometry. Ozone gas was chemically formed by photochemical reaction of oxygen under ulUmviolet illuimination. The oxide growth was monitored for hydrogenated silicon surfaces as functions of oxygen gas flow rate, gas pressure and wafer temperature. Initial oxidation rates were very high at almost all the temperatures. The oxidation rate was 0.2 nm/min about ten times higher than that for thermal oxidation without UV light at low temperatures. The accelerated oxidation was probably due to an electric field effect on the oxidation of back-bond silicon by active oxygen atoms included in the ozone gas.

In-Situ Observation of Oxygen Exposed Hydrogen Terminated Silicon Surfaces

1995 ◽  
Author(s):  
Hiroki OGAWA ◽  
Kenji ISHIKAWA ◽  
Masaru AOKI ◽  
Shuzo FUJIMURA ◽  
Nobuo UENO ◽  
...  
Keyword(s):  
Silicon Surfaces ◽  
In Situ Observation

In Situ Visualization Measurement of Flat Plate Ablation in High-Temperature Gas Flow

2018 ◽  
Vol 85 (6) ◽  
Author(s):  
Zhe Qu ◽  
Xian Wang ◽  
Yunlong Tang ◽  
Honghong Su ◽  
Lianzhong Chen ◽  
...  
Keyword(s):  
Flat Plate ◽  
Thermal Ablation ◽  
Gas Flow ◽  
Feature Detection ◽  
Thermal Protection ◽  
Experimental Results ◽  
Image Feature ◽  
In Situ Observation ◽  
Optoelectronic System

In this work, we develop an optoelectronic system for in situ observation and measurement in hypervelocity flows. The system has the advantages of strong radiation resistance and self-adaptive exposure time of the cameras. Thermal ablation test using flat plate thermal protection system material was carried out in an arc jet. Real-time ablation images were captured and analyzed to understand the thermal ablation mechanism. Through the modified algorithms of particle image velocity (PIV) and image feature detection, the surface recession rate and the velocity distribution of the melted droplets flowing on the sample surface were obtained. The experimental results demonstrate vast potential for using this in situ measuring technique in various engineering applications. Finally, the formation and merging of the melted droplets was analyzed based on energy theory, and the numerical simulation results showed good agreement with the actual experimental results.

scholarly journals Preparation, Characterization and Tribological Properties of Diamond-Like Carbon Film on AZ31 Magnesium Alloy

2019 ◽  
Vol 804 ◽  
pp. 69-74
Author(s):  
Bei Bei Han ◽  
Dong Ying Ju ◽  
Susumu Sato ◽  
Hui Jun Zhao
Keyword(s):  
Tribological Properties ◽  
Gas Flow ◽  
Carbon Film ◽  
Observation System ◽  
In Situ Observation ◽  
Force Measurements ◽  
Maximum Hardness ◽  
Low Friction ◽  
Dlc Coatings

In this study, DLC films were deposited using IBED with various CH4/H2 ratio, gas flow rates and accelerating voltages. The composition and mechanical properties of the DLC coatings were characterized using SEM, Raman spectroscopy and nanoindentor. The tribological properties of the coating were also investigated using a frictional surface microscope with an in situ observation system and friction force measurements. The DLC films were characterized by a lower ID/IG, higher hardness, and improved tribological properties when deposited at a lower accelerating voltage (6 kV). At the CH4/H2 ratio of 1:99 and 6 sccm/6 kV, minimum ID/IG values of 0.62, relatively low friction coefficient of 0.12 , and a maximum hardness of 4056 HV were attained respectively.

scholarly journals In Situ Observation of Epitaxial Growth during Evaporative Simultaneous Crystallization from Aqueous Electrolytes in Droplets

Crystals ◽  
2021 ◽  
Vol 11 (9) ◽  
pp. 1122
Author(s):  
Frederico M. Penha ◽  
Fábio R. D. Andrade ◽  
Amanda S. Lanzotti ◽  
Paulo F. Moreira Junior ◽  
Gustavo P. Zago ◽  
...  
Keyword(s):  
Sodium Chloride ◽  
Complex Systems ◽  
Epitaxial Growth ◽  
The Other ◽  
In Situ Observation ◽  
Aqueous Electrolytes ◽  
Industrial Crystallization ◽  
Ternary Solutions ◽  
Almost All

In this study, crystallization phenomena were investigated by real-time in situ observation of seeded droplets under evaporation using a self-developed hot-stage platform. Ternary solutions at eutonic conditions at 25 °C were investigated for the following systems: NaCl–KCl–H2O, NaCl–CaSO4–H2O, and NaCl–Na2SO4–H2O. Evidence of epitaxial growth was found for aqueous NaCl–KCl and aqueous NaCl–Na2SO4. Sodium chloride nucleated and grew epitaxially upon the other substrates in a larger proportion compared with the inverse. This observation could be related to the higher solubility, and consequently higher residual supersaturation of NaCl regarding the other components. Hopper-like NaCl crystals developed in almost all systems. The results may help devise strategies to control particle morphologies and purity in industrial crystallization from complex systems.

Model Calculation of SiC Oxidation Rates in the Thin Oxide Regime

2008 ◽  
Vol 600-603 ◽  
pp. 663-666 ◽  
Author(s):  
Yasuto Hijikata ◽  
Takeshi Yamamoto ◽  
Hiroyuki Yaguchi ◽  
Sadafumi Yoshida
Keyword(s):  
Growth Rate ◽  
Model Calculation ◽  
Oxidation Mechanism ◽  
Oxide Thickness ◽  
Emission Model ◽  
Initial Oxidation ◽  
Oxidation Rates ◽  
Oxidation Stage ◽  
Thin Oxide

To explain the growth rate enhancement of SiC oxidation in the thin oxide regime, which was recently found from the real time monitoring experiments of the initial oxidation stage of SiC (000–1) C-face using an in-situ spectroscopic ellipsometer, we tried to apply the interfacial Si emission model, which has been originally proposed for Si oxidation, and found that the Si emission model successfully reproduced the SiC oxidation rates at the whole range of oxide thickness and at oxidation temperatures measured. By comparing with the simulations for Si oxidation, we have discussed the oxidation mechanism of SiC.

In Situ Observation of Catalyzed Gasification of Graphite by Nickel

1981 ◽  
Vol 39 ◽  
pp. 76-77
Author(s):  
R. T. K. Baker ◽  
R. D. Sherwood
Keyword(s):  
Objective Lens ◽  
In Situ Observation ◽  
Gas Flows ◽  
Catalytic Gasification ◽  
Television Camera ◽  
Viewing Screen ◽  
Fuels And Chemicals ◽  
Gasification Of Carbon ◽  
Transmission Microscope

The catalytic gasification of carbon at high temperature by microscopic size metal particles is of fundamental importance to removal of coke deposits and conversion of refractory hydrocarbons into fuels and chemicals. The reaction of metal/carbon/gas systems can be observed by controlled atmosphere electron microscopy (CAEM) in an 100 KV conventional transmission microscope. In the JEOL gas reaction stage model AGl (Fig. 1) the specimen is positioned over a hole, 200μm diameter, in a platinum heater strip, and is interposed between two apertures, 75μm diameter. The control gas flows across the specimen and exits through these apertures into the specimen chamber. The gas is further confined by two apertures, one in the condenser and one in the objective lens pole pieces, and removed by an auxiliary vacuum pump. The reaction zone is <1 mm thick and is maintained at gas pressure up to 400 Torr and temperature up to 1300<C as measured by a Pt-Pt/Rh 13% thermocouple. Reaction events are observed and recorded on videotape by using a Philips phosphor-television camera located below a hole in the center of the viewing screen. The overall resolution is greater than 2.5 nm.

In situ observation of the martensitic transformation in (Mg,Y)-PSZ

1986 ◽  
Vol 44 ◽  
pp. 500-501
Author(s):  
R-R. Lee
Keyword(s):  
Martensitic Transformation ◽  
High Strength ◽  
Nucleation And Growth ◽  
In Situ Observation ◽  
Considerable Potential ◽  
Transmission Electron ◽  
Structural Applications ◽  
Applied Stresses ◽  
Kinetics Of

Partially-stabilized ZrO2 (PSZ) ceramics have considerable potential for advanced structural applications because of their high strength and toughness. These properties derive from small tetragonal ZrO2 (t-ZrO2) precipitates in a cubic (c) ZrO2 matrix, which transform martensitically to monoclinic (m) symmetry under applied stresses. The kinetics of the martensitic transformation is believed to be nucleation controlled and the nucleation is always stress induced. In situ observation of the martensitic transformation using transmission electron microscopy provides considerable information about the nucleation and growth aspects of the transformation.

In situ TEM observations of melting in nanosized eutectic Pb-Cd inclusions embedded in Al

1996 ◽  
Vol 54 ◽  
pp. 986-987
Author(s):  
S. Hagège ◽  
U. Dahmen ◽  
E. Johnson ◽  
A. Johansen ◽  
V.S. Tuboltsev
Keyword(s):  
Electron Microscope ◽  
Melt Spinning ◽  
Ternary Alloys ◽  
Solid Matrix ◽  
Eutectic System ◽  
In Situ Tem ◽  
In Situ Observation ◽  
Orientation Relationships ◽  
Transmission Electron

Small particles of a low-melting phase embedded in a solid matrix with a higher melting point offer the possibility of studying the mechanisms of melting and solidification directly by in-situ observation in a transmission electron microscope. Previous studies of Pb, Cd and other low-melting inclusions embedded in an Al matrix have shown well-defined orientation relationships, strongly faceted shapes, and an unusual size-dependent superheating before melting.[e.g. 1,2].In the present study we have examined the shapes and thermal behavior of eutectic Pb-Cd inclusions in Al. Pb and Cd form a simple eutectic system with each other, but both elements are insoluble in solid Al. Ternary alloys of Al (Pb,Cd) were prepared from high purity elements by melt spinning or by sequential ion implantation of the two alloying additions to achieve a total alloying addition of up to lat%. TEM observations were made using a heating stage in a 200kV electron microscope equipped with a video system for recording dynamic behavior.

Sign in / Sign up

Export Citation Format

Share Document