AbstractElectrodes made of amorphous silicon are a promising alternative to graphite as anode material for the next generation of high-capacity Li-ion batteries. In order to optimize such batteries the mechanism of lithium incorporation into the electrode during charging has to be elucidated. In the present study we measured the modification of lithium distribution taking place during galvanostatic lithiation of about 600 nm thick amorphous silicon film electrodes at low current densities of about 30 μA/cm