scholarly journals Large-area pixelated metasurface beam deflector on a 12-inch glass wafer for random point generation

Nanophotonics ◽  
2019 ◽  
Vol 8 (10) ◽  
pp. 1855-1861 ◽  
Author(s):  
Nanxi Li ◽  
Yuan Hsing Fu ◽  
Yuan Dong ◽  
Ting Hu ◽  
Zhengji Xu ◽  
...  

AbstractMetasurface-based beam deflector, as an important optical element to bend the light propagation direction, has drawn a lot of interests in research to achieve miniaturization of devices and reduction of system complexity. Based on the 12-inch immersion lithography technology, in this work, an ultra-thin and large-area pixelated metasurface beam deflector with a footprint of 2500 × 2500 μm, formed by nanopillars with diameters from 221 to 396 nm, is demonstrated on a 12-inch glass wafer. The 21 × 21 array of deflectors is designed to bend the input light in different directions and to generate 441 random points. In addition, the layer transfer on the 12-inch glass wafer makes the device working in transmission mode at a 940-nm wavelength. The random point array generated from the experiment shows good match with the design. This pixelated metasurface beam deflector can generate random points simultaneously and has potential to make beam steering by switching each pixel of the beam deflector, which can be applied on motion detection, facial recognition, and light detection and ranging.

2018 ◽  
Vol 6 (6) ◽  
pp. 525 ◽  
Author(s):  
Carlo Edoardo Campanella ◽  
Martino De Carlo ◽  
Antonello Cuccovillo ◽  
Vittorio M. N. Passaro

Sensors ◽  
2020 ◽  
Vol 20 (10) ◽  
pp. 2874
Author(s):  
Xuan Liu ◽  
Lisa Samfaß ◽  
Kevin Kolpatzeck ◽  
Lars Häring ◽  
Jan C. Balzer ◽  
...  

With an increasing number of applications of terahertz systems in industrial fields and communications, terahertz beamforming and beam steering techniques are required for high-speed, large-area scanning. As a promising means for beam steering, micro-electro-mechanical system (MEMS)-based reflection gratings have been successfully implemented for terahertz beam control. So far, the diffraction grating efficiency is relatively low due to the limited vertical displacement range of the reflectors. In this paper, we propose a design for a reconfigurable MEMS-based reflection grating consisting of multiple subwavelength reflectors which are driven by 5-bit, high-throw electrostatic actuators. We vary the number of the reflectors per grating period and configure the throw of individual reflectors so that the reflection grating is shaped as a blazed grating to steer the terahertz beam with maximum diffraction grating efficiency. Furthermore, we provide a mathematical model for calculating the radiation pattern of the terahertz wave reflected by general reflection gratings consisting of subwavelength reflectors. The calculated and simulated radiation patterns of the designed grating show that we can steer the angle of the terahertz waves in a range of up to ± 56.4 ∘ with a maximum sidelobe level of −10 dB at frequencies from 0.3 THz to 1 THz.


2009 ◽  
Vol 17 (25) ◽  
pp. 23078 ◽  
Author(s):  
Xinyuan Qi ◽  
Guoquan Zhang ◽  
Ningning Xu ◽  
Yiling Qi ◽  
Bin Han ◽  
...  

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Timothy Lee ◽  
Qi Sun ◽  
Martynas Beresna ◽  
Gilberto Brambilla

AbstractWe introduce the fabrication and use of microcracks embedded in glass as an optical element for manipulating light propagation, in particular for enhancing waveguide performance in silica integrated optics. By using a femtosecond laser to induce a strong asymmetric stress pattern in silica, uniform cracks with set dimensions can be created within the substrate and propagated along a fixed path. The smoothness of the resulting cleave interface and large index contrast can be exploited to enhance waveguide modal confinement. As a demonstration, we tackle the longstanding high bend-loss issue in femtosecond laser written silica waveguides by using this technique to cleave the outer edge of laser written waveguide bends, to suppress radiative bend loss. The microcrack cross section is estimated to be 15 μm in height and 30 nm in width, for the 10 $$\times$$ ×  10 μm waveguides. At 1550 nm wavelength, losses down to 1 dB/cm at 10 mm bend radius were achieved, without introducing additional scattering. Both the cleave stress pattern and waveguide are fabricated with the same multiscan writing procedure, without requiring additional steps, and re-characterisation of the waveguides after 1 year confirm excellent long term performance stability.


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