Development and characterization of homo, co and terpolyimides based on BPDA, BTDA, 6FDA and ODA with low dielectric constant

2014 ◽  
Vol 34 (9) ◽  
pp. 867-873 ◽  
Author(s):  
Revathi Purushothaman ◽  
I. Mohammed Bilal

Abstract Polyimides are a sophisticated family of materials, which cover an exhaustive range of high performance polymers and find applications from aerospace to microelectronics. Microelectronic applications demand low dielectric constant and high performance. Aromatic terpolyimides were synthesized by reacting 3,3′,4,4′-biphenyl tetracarboxylic dianhydride (BPDA), 3,3′,4,4′-benzophenone tetracarboxylic dianhydride (BTDA) and 4,4′-(hexafluoroisopropylidene) diphthalic anhydride (6FDA) with 4,4′-oxydianiline (ODA) by thermal imidization with the view to decrease their dielectric constant without compromising thermal properties and mechanical properties compared to their homo and copolyimides. They were characterized by Fourier transform infrared spectroscopy (FTIR), thermogravimetric analysis (TGA), differential scanning calorimetry (DSC) and X-ray diffraction (XRD). Their FTIR spectra established formation of polyimide by the characteristic vibrations at 1375 cm-1 (C-N stretch) and 1113 cm-1 (imide ring deformation). The TGA results showed decomposition of imides at about 515°C. The glass transition temperature (Tg) of the polymers varied from 261°C to 281°C. The XRD spectrum of BPDA/BTDA/6FDA-ODA, which contained 50% of 6FDA, showed a broadened envelope with a peak at 16.8° (2θ), illustrating a semicrystalline nature. Incorporation of 6FDA, with a bulky bridging group into the backbone of BPDA/6FDA-ODA and BPDA/BTDA/6FDA-ODA (0.25:0.25:0.5::1) caused a decrease in the dielectric constant (2.13 and 2.38, respectively). Such polyimides can find application in microelectronics such as flexible printed circuits and tape automated bonding applications.

2007 ◽  
Vol 50 (6) ◽  
pp. 1803 ◽  
Author(s):  
Rangaswamy Navamathavan ◽  
An Soo Jung ◽  
Hyun Seung Kim ◽  
Young Jun Jang ◽  
Chi Kyu Choi ◽  
...  

2019 ◽  
Vol 10 (19) ◽  
pp. 2387-2396 ◽  
Author(s):  
Kan Zhang ◽  
Xinye Yu ◽  
Shiao-Wei Kuo

A high performance cross-linked polymer with a very low dielectric constant was achieved via a newly designed main-chain type poly(benzoxazine-co-imide-co-siloxane).


RSC Advances ◽  
2015 ◽  
Vol 5 (93) ◽  
pp. 76476-76482 ◽  
Author(s):  
Zhenxun Huang ◽  
Shumei Liu ◽  
Yanchao Yuan ◽  
Jianqing Zhao

A simple strategy for preparing the low-κ FPI hybrids with enhanced properties.


2013 ◽  
Vol 1561 ◽  
Author(s):  
M.A Jithin ◽  
Lakshmi Ganapathi Kolla ◽  
Navakanta Bhat ◽  
S. Mohan ◽  
Yuichiro Morozumi ◽  
...  

ABSTRACTIn this study, synthesis and characterization of rutile-Titanium dioxide (TiO2) thin films using pulsed DC Magnetron Sputtering at room temperature, along with the fabrication and characterization of MIM capacitors have been discussed. XPS and RBS data show that the films are stoichiometric and have compositional uniformity. The influence of electrode materials on electrical characteristics of the fabricated MIM capacitors has been studied. The Al/TiO2/Al based capacitors show low capacitance density (9 fF/μm2) with low dielectric constant (K=25) and high EOT (3.67 nm) due to low dielectric constant TiO2 phase formation on Al/Si substrate. On the other hand, Ru/TiO2/Ru based capacitors show high capacitance density (49 fF/μm2) with high dielectric constant (K=130) and low EOT (0.7nm) values at high frequency (100 KHz) due to high dielectric constant phase (rutile) formation of TiO2, on Ru/Si substrate. Raman spectra confirm that the films deposited on Ru/Si substrate show the rutile phase.


2015 ◽  
Vol 46 (1) ◽  
pp. 450-453
Author(s):  
Haiwei Chen ◽  
Fenglin Peng ◽  
Shin-Tson Wu ◽  
Minggang Hu ◽  
Jian Li ◽  
...  

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