Impurity detection in polymer parts for the semiconductor manufacturing industry

2018 ◽  
Vol 85 (11) ◽  
pp. 700-712
Author(s):  
T. Moldaschl ◽  
T. Arnold ◽  
M. Zauner ◽  
S. Meislitzer ◽  
D. Obersteiner ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Manufacturing Industry ◽  
Detailed Knowledge ◽  
Non Destructive Testing ◽  
Destructive Testing ◽  
Production Chain ◽  
Processing Step ◽  
Testing Techniques ◽  
Non Destructive ◽  
Laboratory Demonstrator

Abstract The very strict purity requirements of polymer parts that are used in the semiconductor manufacturing industry lead to an excessively low yield rate. To decrease the costs in the production chain, detailed knowledge about possible impurities during each processing step is essential. This work provides an overview of non-destructive testing techniques that are capable of either detecting or even identifying these impurities. The most promising techniques were then combined in a semi-automatized laboratory demonstrator that can be used as an in-line diagnostics tool to prevent processing of faulty parts. Results from these measurements are presented and discussed.

Acoustic and Photoacoustic Inspection of Through-Silicon Vias in the GHz-Frequency Band

2017 ◽  
Author(s):  
Sebastian Brand ◽  
Michael Kögel ◽  
Frank Altmann ◽  
Ingrid DeWolf ◽  
Ahmad Khaled ◽  
...  
Keyword(s):  
Quality Assessment ◽  
Frequency Band ◽  
Process Development ◽  
Three Dimensional ◽  
Non Destructive Testing ◽  
Destructive Testing ◽  
Vertical Interconnection ◽  
Testing Techniques ◽  
Silicon Vias ◽  
Non Destructive

Abstract Through Silicon Via (TSV) is the most promising technology for vertical interconnection in novel three-dimensional chip architectures. Reliability and quality assessment necessary for process development and manufacturing require appropriate non-destructive testing techniques to detect cracks and delamination defects with sufficient penetration and imaging capabilities. The current paper presents the application of two acoustically based methods operating in the GHz-frequency band for the assessment of the integrity of TSV structures.

scholarly journals Porosity and Inclusion Detection in CFRP by Infrared Thermography

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
C. Toscano ◽  
C. Meola ◽  
M. C. Iorio ◽  
G. M. Carlomagno
Keyword(s):  
Infrared Thermography ◽  
Production Costs ◽  
Non Destructive Testing ◽  
Destructive Testing ◽  
Evaluation Methodologies ◽  
Slag Inclusions ◽  
Aeronautical Industry ◽  
Testing Techniques ◽  
Lock In ◽  
Non Destructive

The ever wide use of composite materials in the aeronautical industry has evidenced the need for development of ever more effective nondestructive evaluation methodologies in order to reduce rejected parts and to optimize production costs. Infrared thermography has been recently enclosed amongst the standardized non destructive testing techniques, but its usefulness needs still complete assessment since it can be employed in several different arrangements and for many purposes. In this work, the possibility to detect slag inclusions and porosity is analyzed with both lock-in themography and pulse thermography in the transmission mode. To this end, carbon-fiber-peinforced polymers different specimens are specifically fabricated of several different stacking sequences and with embedded slag inclusions and porosity percentages. As main results, both of the techniques are found definitely able to reveal the presence of the defects above mentioned. Moreover, these techniques could be considered complementary in order to better characterize the nature of the detected defects.

Three Non-Destructive Methods for the Modulus of Elasticity of the Trachea

2004 ◽  
Author(s):  
V. Hermawan ◽  
A. M. Al-Jumaily ◽  
M. Fatemi
Keyword(s):  
Modulus Of Elasticity ◽  
Radial Strain ◽  
Propagation Path ◽  
Non Destructive Testing ◽  
Thin Cylindrical Shell ◽  
Destructive Testing ◽  
Pros And Cons ◽  
Testing Techniques ◽  
Non Destructive ◽  
Practical Recommendations

Three non-destructive testing techniques are developed and investigated to determine the Young’s modulus of elasticity of the trachea and the results are compared with the standard uniaxial state of stress method. These techniques are based on: (1) simulating the trachea as a pressurized vessel and deducing a special relationship between the pressure and the radial strain; (2) using two hydrophones and determining the variation in acoustic transmittance caused by the presence of the trachea in a propagation path within a water-bath; (3) considering the trachea as a thin cylindrical shell and determining the resonance radial vibration response. Discussion is presented to identify the “pros” and “cons” of each technique and final practical recommendations are made.

scholarly journals Non-destructive testing and evaluation of composite materials/structures: A state-of-the-art review

2020 ◽  
Vol 12 (4) ◽  
pp. 168781402091376 ◽  
Author(s):  
Bing Wang ◽  
Shuncong Zhong ◽  
Tung-Lik Lee ◽  
Kevin S Fancey ◽  
Jiawei Mi
Keyword(s):  
Composite Materials ◽  
Composite Structures ◽  
Neutron Imaging ◽  
Image Correlation ◽  
Historical Background ◽  
Non Destructive Testing ◽  
Destructive Testing ◽  
Testing Technique ◽  
Testing Techniques ◽  
Non Destructive

Composite materials/structures are advancing in product efficiency, cost-effectiveness and the development of superior specific properties. There are increasing demands in their applications to load-carrying structures in aerospace, wind turbines, transportation, medical equipment and so on. Thus, robust and reliable non-destructive testing of composites is essential to reduce safety concerns and maintenance costs. There have been various non-destructive testing methods built upon different principles for quality assurance during the whole lifecycle of a composite product. This article reviews the most established non-destructive testing techniques for detection and evaluation of defects/damage evolution in composites. These include acoustic emission, ultrasonic testing, infrared thermography, terahertz testing, shearography, digital image correlation, as well as X-ray and neutron imaging. For each non-destructive testing technique, we cover a brief historical background, principles, standard practices, equipment and facilities used for composite research. We also compare and discuss their benefits and limitations and further summarise their capabilities and applications to composite structures. Each non-destructive testing technique has its own potential and rarely achieves a full-scale diagnosis of structural integrity. Future development of non-destructive testing techniques for composites will be directed towards intelligent and automated inspection systems with high accuracy and efficient data processing capabilities.

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