Darstellung und Charakterisierung einfacher α-Sila- und α,ω-Disilaalkane als Vorstufen für die CVD-Erzeugung von amorphem Silicium a-SiC:H / Synthesis and Characterization of Simple α-Sila- and α,ω-Disilaalkanes: Precursors for the CVD Production of Amorphous Silicon a-SiC:H

Preparative methods have been explored for the synthesis of small, volatile polysilaalkanes, which could serve as starting materials for the production of amorphous silicon a-SiC:H. High yield pathways have been developed for H3SiCH2CH2SiH3 and H3SiCH2CH2CH2SiH3. These compounds can be converted into symmetrically halogen-functional derivatives through the reac­tions with SnCl4 or Br2. The homologous H3SiCH2CH2SiH2CH3 has also been prepared and halogenated, starting from the corresponding vinylsilane via the hydrosilylation route. Allylsilanes were the source of the synthesis of H3SiCH2CH=CH2, CH3SiH2CH2CH=CH, SiH2(CH2CH = CH2)2, SiH2(CH2CH2CH2SiH3)2, or HSi(CH2CH2CH2SiH3)3. Methylated deriva­tives are also available. - Some physical and spectroscopic properties of the new compounds have been investigated. In particular. NMR data were collected and used for an assessment of structure and isomerism.