Micro-Raman Scattering of Nanoscale Silicon in Amorphous and Porous Silicon
Keyword(s):
Abstract:The size effect of nanoscale silicon in both amorphous and porous silicon was investigated with micro-Raman spectroscopy. Silicon nanostructures in amorphous silicon were deposited on quartz substrates by plasma enhanced chemical vapor deposition (PECVD) with deposition powers of 15, 30 and 50 W. Micro-Raman spectra of the nanostructured silicon show the T
2013 ◽
Vol 686
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pp. 28-32
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1995 ◽
pp. 243-282
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1999 ◽
Vol 17
(6)
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pp. 3240-3245
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