Verschleißschutzschichten für das Halbwarmschmieden

2021 ◽  
Vol 116 (11) ◽  
pp. 806-809
Author(s):  
David Schellenberg ◽  
Marcel Plogmeyer ◽  
Jens Kruse ◽  
Malte Stonis ◽  
Bernd-Arno Behrens ◽  
...  
Keyword(s):  
Diamondlike Carbon

Abstract Im Automobil- und Maschinenbau werden massivumgeformte Bauteile in vielen Anwendungen eingesetzt. Die Gesenke für die Bauteile erfahren während der Umformung aufgrund von hohen Umformkräften und Temperaturen einen hohen Verschleiß. Um einen wirtschaftlichen Produktionsbetrieb zu ermöglichen, wurden Methoden zur Verminderung des Verschleißes bei der Halbwarmumformung untersucht. Eine vielversprechende Methode ist der Einsatz von Diamondlike-Carbon (DLC)-Verschleißschutzschichten.

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

scholarly journals Diamondlike Carbon Applications in Infrared Optics and Microelectronics

1991 ◽  
Vol 52-53 ◽  
pp. 577-608 ◽  
Author(s):  
J.A. Woollam ◽  
B.N. De ◽  
S. Orzeszko ◽  
Ned J. Ianno ◽  
P.G. Snyder ◽  
...  
Keyword(s):  
Infrared Optics ◽  
Diamondlike Carbon

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser

scholarly journals Thin‐film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

1988 ◽  
Vol 64 (8) ◽  
pp. 4175-4180 ◽  
Author(s):  
S. Orzeszko ◽  
Bhola N. De ◽  
John A. Woollam ◽  
John J. Pouch ◽  
Samuel A. Alterovitz ◽  
...  
Keyword(s):  
Thin Film ◽  
Quantitative Analysis ◽  
Spectroscopic Ellipsometry ◽  
Variable Angle ◽  
Diamondlike Carbon ◽  
Variable Angle Spectroscopic Ellipsometry

Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere

1992 ◽  
Author(s):  
Kaoru Suzuki ◽  
Tetsuya Taniyama ◽  
Junji Nakata ◽  
Takaya Masutani
Keyword(s):  
Laser Ablation ◽  
Carbon Films ◽  
Ion Source ◽  
Synthesis Technique ◽  
Diamondlike Carbon
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