Interaction of a 10 eV silicon beam with the Si(111) surface: A molecular dynamics study
1987 ◽
Vol 2
(6)
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pp. 805-808
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Keyword(s):
The interaction of a low-energy silicon beam with a silicon substrate has been simulated. The combined effects of vibrational lattice excitation and of covalent binding have been included for the first time by using a molecular dynamics technique and an empirical potential that accurately describes the covalent Si–Si interactions. A 10 eV silicon beam was directed normal to a silicon (111) substrate. Sticking ratio, penetration depth, substrate structure, and vibrational excitation of the substrate are quantitatively determined. The special features of such low-energy beam deposition relative to thermal deposition processes are discussed.
Molecular dynamics simulation of non-equilibrium low energy (1–100 eV) ion beam deposition processes
1994 ◽
Vol 91
(1-4)
◽
pp. 593-596
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1987 ◽
Vol 5
(5)
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pp. 1393
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Keyword(s):
1994 ◽
Vol null
(1)
◽
pp. 321-343
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Keyword(s):
Keyword(s):
Keyword(s):