Diamond-like carbon films prepared by rf substrate biasing in an ECR discharge

1990 ◽  
Vol 5 (11) ◽  
pp. 2441-2444 ◽  
Author(s):  
W. Varhue ◽  
P. Pastel
Keyword(s):  
Band Gap ◽  
Hydrogen Content ◽  
Optical Band Gap ◽  
Carbon Films ◽  
Atomic Fraction ◽  
Diamond Like Carbon ◽  
Pure Methane

The optical band gap, density, and hydrogen content of diamond-like carbon films have been controllably varied by rf biasing the substrate in an ECR discharge of pure methane. The optical band gap varied from 2.7 to 1.2 eV, the density from 1.4 to 2.2 g/cm3, and the atomic fraction of hydrogen from 50 to 5%. The range of measured values is in agreement with those predicted by both the random covalent network and defected graphite models.

Optical Band Gap of Diamond-Like Carbon Films as a Function of RF Substrate Bias

1989 ◽  
Vol 162 ◽  
Author(s):  
P. W. Pastel ◽  
W. J. Varhue
Keyword(s):  
Band Gap ◽  
Cyclotron Resonance ◽  
Optical Band Gap ◽  
Electron Cyclotron Resonance ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Ion Energy ◽  
Resonance Plasma

ABSTRACTDiamond-like carbon films have been deposited with a low temperature 2.45 GHz electron cyclotron resonance plasma enhanced chemical vapor deposition system. The bombarding ion energy was independently controlled with a RF bias to the substrate. The production rate of reactant species and the impinging ion energy are decoupled with this system. The optical band gap decreased from 2.7 to 1.2 eV as substrate bias was increased from 0 to -140 V.

Effect of Various CF4/CH4 Flow Ratios on Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Thin Films

2010 ◽  
Vol 663-665 ◽  
pp. 312-315
Author(s):  
Jian Rong Xiao ◽  
Tao Tong ◽  
Yan Wei Li ◽  
Xin Hai Li
Keyword(s):  
Thin Films ◽  
Band Gap ◽  
Vapor Deposition ◽  
Gas Flow ◽  
Optical Band Gap ◽  
Chemical Vapor ◽  
Uniform Structure ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Fluorinated diamond-like carbon (F-DLC) thin films are deposited using radio frequency plasma enhanced chemical vapor deposition under various gas flow ratios. The surface morphology of the F-DLC thin films deposited at lower gas flow ratios is a compact and uniform structure, and it became rough with the increase of gas flow ratios. The relative atomic contents of fluorine and chemical bonding configurations of C-Fx (x=1, 2, 3) in the thin films increases with the increase of gas flow ratios. The optical band gap of the thin films presents a decrease of different degree with the increase of gas flow ratios.

Nanostructure Evolution and Optical Properties of Silver Doped Diamond Like Carbon Thin Film on Soft Polymer

2018 ◽  
Vol 24 (8) ◽  
pp. 5731-5736 ◽  
Author(s):  
Md. Shahbaz Alam ◽  
Chandan Kumar Ghosh ◽  
Nillohit Mukherjee ◽  
Sk. Faruque Ahmed
Keyword(s):  
Optical Properties ◽  
Photoelectron Spectroscopy ◽  
Strain Energy ◽  
Elastic Moduli ◽  
Optical Band Gap ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Spectroscopy Analysis ◽  
X Ray ◽  
Soft Polymer

Effect of silver doping on nanostructure evolution and optical properties of diamond like carbon films synthesized on elastomeric polymer of poly-dimenthylsiloxane (PDMS) and silicon substrate via radio frequency reactive sputtering technique were studied in detail. Due to difference in elastic moduli of PDMS substrate and silver doped diamond like carbon (Ag:DLC) films, a well-defined nanostructure wrinkle pattern have formed on PDMS for releasing the strain energy induced by residually compressed stress in Ag:DLC film. X-ray photoelectron spectroscopy analysis revealed the different bonding information between silver and carbon and the chemical composition of the Ag:DLC films. The introduction of silver in the DLC matrix, decreased the optical transparency as well as the optical band gap from 3.97 to 3.25 eV with a variation of Ag at.% from 0 to 9.2 in the films. The Urbach parameter calculated from the transmitance data, increased with the increase of the Ag doping percentage.

scholarly journals Chemical structure and physical properties of diamond-like amorphous carbon films prepared by magnetron sputtering

1990 ◽  
Vol 5 (11) ◽  
pp. 2543-2554 ◽  
Author(s):  
N-H. Cho ◽  
K. M. Krishnan ◽  
D. K. Veirs ◽  
M. D. Rubin ◽  
C. B. Hopper ◽  
...  
Keyword(s):  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
Physical Properties ◽  
Band Gap ◽  
Amorphous Carbon ◽  
Chemical Structure ◽  
Optical Band Gap ◽  
Mass Density ◽  
Carbon Films ◽  
Chemical Structures

Thin films of amorphous carbon (a–C) and amorphous hydrogenated carbon (a–C:H) were prepared using magnetron sputtering of a graphite target. The chemical structures of the films were characterized using electron energy loss spectroscopy (EELS) and Raman spectroscopy. The mass density, hardness, residual stress, optical band gap, and electrical resistivity were determined, and their relation to the film's chemical structure are discussed. It was found that the graphitic component increases with increasing sputtering power density. This is accompanied by a decrease in the electrical resistivity, optical band gap, mass density, and hardness. Increasing the hydrogen content in the sputtering gas mixture results in decreasing hardness (14 GPa to 3 GPa) and mass density, and increasing optical band gap and electrical resistivity. The variation in the physical properties and chemical structures of these films can be explained in terms of the changes in the volume of sp2-bonded clusters in the a–C films and changes in the termination of the graphitic clusters and sp3-bonded networks by hydrogen in the a–C:H films.

Effect of the hydrogen content on optical band gap in a-Si:H:N

1984 ◽  
Vol 63 (3) ◽  
pp. 321-328 ◽  
Author(s):  
Shoji Furukawa ◽  
Nobuo Matsumoto
Keyword(s):  
Band Gap ◽  
Hydrogen Content ◽  
Optical Band Gap

scholarly journals The Influence of Preparation Conditions on the Structural Properties and Hardness of Diamond-Like Carbon Films, Prepared by Plasma Source Ion Implantation

Coatings ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 360 ◽  
Author(s):  
Ruriko Hatada ◽  
Stefan Flege ◽  
Muhammad Naeem Ashraf ◽  
Arne Timmermann ◽  
Christoph Schmid ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Hydrogen Content ◽  
Plasma Source ◽  
Carbon Films ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma Generation ◽  
Preparation Conditions ◽  
Plasma Source Ion Implantation ◽  
Carbon Bonding

Diamond-like carbon (DLC) films were prepared from a hydrocarbon precursor gas by plasma source ion implantation (PSII), in which the plasma generation and the film deposition were coupled; i.e., the plasma was generated by the applied voltage and no additional plasma source was used. Several experimental parameters of the PSII process were varied, including the sample bias (high voltage, DC or pulsed), gas pressure, sample holder type and addition of argon in the plasma gas. The influence of the deposition conditions on the carbon bonding and the hydrogen content of the films was then determined using Raman spectroscopy. Nanoindentation was used to determine the hardness of the samples, and a ball-on-disk test to investigate the friction coefficient. Results suggest that films with a lower sp2 content have both a higher hydrogen content and a higher hardness. This counterintuitive finding demonstrated that the carbon bonding is more important to hardness than the reported hydrogen concentration. The highest hardness obtained was 22.4 GPa. With the exception of a few films prepared using a pulsed voltage, all conditions gave DLC films having similarly low friction coefficients, down to 0.049.

Sign in / Sign up

Export Citation Format

Share Document