High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors
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ABSTRACTWe present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements.
2009 ◽
Vol 18
(03)
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pp. 441-456
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2014 ◽
Vol 887-888
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pp. 417-421
2018 ◽
Vol 2018
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pp. 1-20
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2018 ◽
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