Fabrication of Highly-ordered and Densely-spaced Silicon Nano-needle Arrays for Bio-sensing Applications

2005 ◽  
Vol 900 ◽  
Author(s):  
Aijun Yin ◽  
Jimmy Xu
Keyword(s):  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Aluminum Foil ◽  
Biomolecular Sensing ◽  
Anodic Aluminum ◽  
Sensing Applications ◽  
High Uniformity ◽  
Etching Mask ◽  
Vertically Aligned ◽  
Highly Uniform

ABSTRACTIn this work, we report a success in fabricating highly-ordered and densely-packed array of silicon nano-needles that are vertically aligned, straight and long, meeting many of the requirements for biomolecular sensing and integration with silicon electronics. Yet, we show that they can be fabricated with a relatively simple and non-lithographic method.In this approach the array of nano-needles of high uniformity in length and diameter are made out of silicon by reactive ion etching (RIE) through either an anodic aluminum oxide (AAO) membrane or an array of metallic nano-dot caps that are evaporated on a silicon wafer using an AAO membrane as mask. The AAO membrane itself is formed non-lithographically via anodization of pure aluminum foil and contains an array of highly-ordered and highly-uniform nano-pores. By using the AAO membrane either directly as an etching mask or as an evaporation mask to deposit metallic nanodots which in turn serve as an etching mask, deep and high aspect-ratio etching is possible to allow the formation of the nanoneedles in a Si substrate.

One-Step Anodization Preparation and Photoluminescence Property of Anodic Aluminum Oxide with Nanopore Arrays

2010 ◽  
Vol 663-665 ◽  
pp. 272-275
Author(s):  
Wen Bin Yang ◽  
Xiao Hong Tang
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxygen Vacancies ◽  
Pure Aluminum ◽  
Photoluminescence Property ◽  
Aluminum Foil ◽  
Honeycomb Structure ◽  
Anodic Aluminum ◽  
Nanopore Arrays ◽  
One Step

Anodic aluminum oxide (AAO) film with nanopore arrays was prepared by one-step anodization of highly pure aluminum foil. Morphology, structure and photoluminescence property of AAO were characterized. Results showed that AAO owned honeycomb structure which was characterized by close-packed arrays of columnar hexagonal cells, each containing a central pore normal to the substrate. There were three peaks at around 370, 385 and 470 nm in the PL spectrum of AAO, which should be mainly attributed to the oxygen vacancies.

Vertically Aligned Nanopillar Arrays with Hard Skins Using Anodic Aluminum Oxide for Nano Imprint Lithography

2005 ◽  
Vol 17 (24) ◽  
pp. 6181-6185 ◽  
Author(s):  
Pyung-Soo Lee ◽  
Ok-Joo Lee ◽  
Sun-Kyu Hwang ◽  
Seung-Ho Jung ◽  
Sang Eun Jee ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Imprint Lithography ◽  
Anodic Aluminum ◽  
Vertically Aligned ◽  
Nanopillar Arrays ◽  
Nano Imprint

Patterned Array of Nanoparticles on Substrates via Contact Printing Method with CNTs/AAO Stamp

2008 ◽  
Vol 8 (9) ◽  
pp. 4803-4807 ◽  
Author(s):  
Youn-Su Kim ◽  
Hyo-Jin Ahn ◽  
Sang Hoon Nam ◽  
Sang Ho Lee ◽  
Hee-Sang Shim ◽  
...  
Keyword(s):  
Anodic Aluminum Oxide ◽  
Substrate Surface ◽  
Chemical Vapor ◽  
Oxide Nanoparticles ◽  
Contact Printing ◽  
Fe Oxide ◽  
Anodic Aluminum ◽  
Vertically Aligned ◽  
Partial Chemical ◽  
Printing Method

Patterned arrays of Fe oxide nanoparticles were transferred via contact printing method on a substrate surface using carbon nanotubes embedded in anodic aluminum oxide (CNTs/AAO) as a stamp, in which vertically aligned CNTs in hexagonally patterned array was first fabricated by chemical vapor deposition into the AAO, followed by a partial chemical etching to expose the CNTs from the AAO. Fe precursor inked CNTs stamp was contact-printed on a Pt-coated Si substrate, and after heat treatment at 200 °C, patterned array of Fe oxide nanoparticles with ca. 80 nm of diameter and ca. 120 nm of inter-distance between the nanoparticles was consequently obtained.

Large-Scale Fabrication of 2-D Nanoporous Graphene Using a Thin Anodic Aluminum Oxide Etching Mask

2013 ◽  
Vol 13 (11) ◽  
pp. 7401-7405 ◽  
Author(s):  
Jae-Hyun Lee ◽  
Yamujin Jang ◽  
Keun Heo ◽  
Jeong-Mi Lee ◽  
Soon Hyung Choi ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Large Scale ◽  
Anodic Aluminum ◽  
Oxide Etching ◽  
Nanoporous Graphene ◽  
Etching Mask

scholarly journals The fabrication of high sensitivity gold nanorod H2S gas sensors utilizing the highly uniform anodic aluminum oxide template

AIP Advances ◽  
2016 ◽  
Vol 6 (12) ◽  
pp. 125002 ◽  
Author(s):  
Chien-Yu Li ◽  
Ciao-Yu Li ◽  
You-Lin Wu ◽  
Chung-Ping Hsu ◽  
Ming-Ching Lee ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Gas Sensors ◽  
Anodic Aluminum Oxide ◽  
High Sensitivity ◽  
Anodic Aluminum Oxide Template ◽  
Gold Nanorod ◽  
Anodic Aluminum ◽  
Highly Uniform

Electromechanical Properties of Vertically Aligned Carbon Nanotube

2013 ◽  
Vol 705 ◽  
pp. 332-336 ◽  
Author(s):  
Alimorad Rashidi ◽  
M. Omidi ◽  
M. Choolaei ◽  
M. Nazarzadeh ◽  
A. Yadegari ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Nanotube ◽  
Aluminum Oxide ◽  
Physical Properties ◽  
Anodic Aluminum Oxide ◽  
Electromechanical Properties ◽  
Simple Method ◽  
Anodic Aluminum ◽  
Cylindrical Pores ◽  
Vertically Aligned

In this paper a simple method is used for fabrication of vertically aligned carbon nanotube (VACNT) within the cylindrical pores anodic aluminum oxide (AAO) substrate. Electronic and mechanical properties of VACNT have been obtained after removing AAO substrate. Vertically aligned carbon nanotube shows very interesting electromechanical properties which can be used in CNT-based sensors to detect chemical analytical or physical properties such as temperature orpressure.

Preparation of Anodic Aluminum Oxide Nano-Templates on Polycrystalline Silicon Substrates

2013 ◽  
Vol 724-725 ◽  
pp. 63-66
Author(s):  
Guo Feng Ma ◽  
Hong Ling Zhang ◽  
Hong Bo Fu ◽  
Li Na Sun ◽  
Chun Lin He
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Polycrystalline Silicon ◽  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Oxalic Acid Solution ◽  
Average Diameter ◽  
Silicon Substrates ◽  
Anodic Aluminum ◽  
One Step

The anodic aluminum oxide (AAO) templates on polycrystalline silicon substrate are studied for growth of ordered nano-dot arrays in order to fabricate the porous silicon layers. The AAO templates on polycrystalline silicon substrate with pores of average diameter 50nm were successfully prepared by one-step anodization of high pure aluminum layer deposited on polycrystalline silicon in oxalic acid solution. Scanning electron microscopy (SEM) showed that alumina nano-pore arrays were nicely constructed with smooth wall morphologies and well-defined diameters.

Rapid and tunable growth of well-ordered hexagonal nanoporous anodic aluminum oxide (AAO) structure by two step high temperature anodization

2021 ◽  
Author(s):  
Kashif Azher ◽  
Maaz Akhtar ◽  
Shao-Fu Chang ◽  
Shih-Hsun Chen
Keyword(s):  
High Temperature ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Aluminum Substrate ◽  
Nanoporous Structure ◽  
Average Pore ◽  
Cross Sectional ◽  
Anodic Aluminum ◽  
Nano Channel

In this study, we have developed a swift and well-ordered growth of the Anodic Aluminum Oxide (AAO) nanoporous structure by two-step high temperature anodization of pure Aluminum substrate. The pre-anodization surface treatment of the aluminum substrate assists in the formation of well-organized nanoporous structures. The two-step anodization process was performed in 0.3 M of oxalic acid at 20 °C for 40 V and 45 V to obtain tunable pore diameters. The high temperature of the electrolyte solution helps in the rapid growth of the AAO nanoporous structure. The top surface image of AAO shows a well-ordered nanoporous structure with an average pore diameter of 70 nm at 40 V and 100 nm at 45 V. The SEM cross sectional view also illustrates the well-ordered nano channel and the elemental mapping elaborates the presence of aluminum and oxygen. The thickness of the AAO nanoporous structure was determined by using SEM for three anodization time spans (20, 24 and 28 hours), in which an increasing trend was observed. The fabricated AAO has a higher thickness and a well-ordered nanoporous structure that shows it can be used as a template for fabricating nanostructured materials.

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