Preparation of Anodic Aluminum Oxide Nano-Templates on Polycrystalline Silicon Substrates

2013 ◽  
Vol 724-725 ◽  
pp. 63-66
Author(s):  
Guo Feng Ma ◽  
Hong Ling Zhang ◽  
Hong Bo Fu ◽  
Li Na Sun ◽  
Chun Lin He
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Polycrystalline Silicon ◽  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Oxalic Acid Solution ◽  
Average Diameter ◽  
Silicon Substrates ◽  
Anodic Aluminum ◽  
One Step

The anodic aluminum oxide (AAO) templates on polycrystalline silicon substrate are studied for growth of ordered nano-dot arrays in order to fabricate the porous silicon layers. The AAO templates on polycrystalline silicon substrate with pores of average diameter 50nm were successfully prepared by one-step anodization of high pure aluminum layer deposited on polycrystalline silicon in oxalic acid solution. Scanning electron microscopy (SEM) showed that alumina nano-pore arrays were nicely constructed with smooth wall morphologies and well-defined diameters.

Fabrication and characteristics of the high-sensitivity humidity sensor of anodic aluminum oxide based on silicon substrates

2018 ◽  
Vol 32 (16) ◽  
pp. 1850199 ◽  
Author(s):  
Degao Lan ◽  
Xiaofeng Zhao ◽  
Fei Wang ◽  
Chunpeng Ai ◽  
Dianzhong Wen ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Nonlinear Response ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Silicon Substrates ◽  
High Porosity ◽  
Interdigitated Electrodes ◽  
Anodic Aluminum

The humidity sensor based on silicon substrate is presented in this paper, which consists of anodic aluminum oxide (AAO) film and interdigitated electrodes. By using electro-chemical oxidizing technique, AAO film with high porosity is fabricated on the silicon substrate. Under optimal oxidization condition, pore diameter of 37–79 nm and depth about [Formula: see text]m is achieved. Interdigitated electrodes are fabricated on the top of AAO film by vacuum evaporation deposition method. The results show that the sensor has different nonlinear response in whole range of relative humidity (RH). Moreover, it has almost linear relationship between the capacitance and RH at high RH from 75% to 95%. The highest sensitivity is obtained 613 pF/%RH at 1 kHz, which is much higher than other frequencies.

One-Step Anodization Preparation and Photoluminescence Property of Anodic Aluminum Oxide with Nanopore Arrays

2010 ◽  
Vol 663-665 ◽  
pp. 272-275
Author(s):  
Wen Bin Yang ◽  
Xiao Hong Tang
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxygen Vacancies ◽  
Pure Aluminum ◽  
Photoluminescence Property ◽  
Aluminum Foil ◽  
Honeycomb Structure ◽  
Anodic Aluminum ◽  
Nanopore Arrays ◽  
One Step

Anodic aluminum oxide (AAO) film with nanopore arrays was prepared by one-step anodization of highly pure aluminum foil. Morphology, structure and photoluminescence property of AAO were characterized. Results showed that AAO owned honeycomb structure which was characterized by close-packed arrays of columnar hexagonal cells, each containing a central pore normal to the substrate. There were three peaks at around 370, 385 and 470 nm in the PL spectrum of AAO, which should be mainly attributed to the oxygen vacancies.

scholarly journals Template-Based Electrochemically Controlled Growth of Segmented Multimetal Nanorods

2010 ◽  
Vol 2010 ◽  
pp. 1-7 ◽  
Author(s):  
Mee Rahn Kim ◽  
Dong Ki Lee ◽  
Du-Jeon Jang
Keyword(s):  
Aluminum Oxide ◽  
Direct Current ◽  
Anodic Aluminum Oxide ◽  
Counter Electrode ◽  
Electrochemical Cell ◽  
Average Diameter ◽  
Electrodeposition Process ◽  
One Dimensional ◽  
Anodic Aluminum ◽  
One Dimensional Nanostructures

Multisegmented one-dimensional nanostructures composed of gold, copper, and nickel have been fabricated by depositing metals electrochemically in the pores of anodic aluminum oxide (AAO) templates. The electrodeposition process has been carried out using a direct current in a two-electrode electrochemical cell, where a silver-evaporated AAO membrane and a platinum plate have served as a working electrode and a counter electrode, respectively. The striped multimetal rods with an average diameter of about 300 nm have tunable lengths ranging from a few hundred nanometers to a few micrometers. The lengths and the sequence of metal segments in a striped rod can be tailored readily by controlling the durations of electrodeposition and the order of electroplating solutions, respectively.

Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by using Cl2/BCl3 Neutral Beam Etching

2011 ◽  
Vol 158 (5) ◽  
pp. D254 ◽  
Author(s):  
J. K. Yeon ◽  
W. S. Lim ◽  
J. B. Park ◽  
N. Y. Kwon ◽  
S. I. Kim ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Barrier Layer ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Neutral Beam ◽  
Anodic Aluminum ◽  
Oxide Barrier ◽  
Neutral Beam Etching
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