The Role of Metal and Passivation Defects in Electromigration-Induced Damage in Thin Film Conductors
The effect of both metal defects (nicks and scratches) and passivation defects (Griffith cracks or pinholes) was theoretically and experimentally investigated. Flux divergences due to temperature and stress gradients are considered. It was observed that failure near a severe metal defect or at a defect in the passivation layer can be a major contributor to electromigration-induced lifetime degradation.
2017 ◽
Vol 38
(4)
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pp. 469-472
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1986 ◽
Vol 44
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pp. 732-733
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2019 ◽
Vol 123
(33)
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pp. 20278-20286
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