Three-Dimensional Integration Technology Based on Self-Assembled Chip-to-Wafer Stacking

2008 ◽  
Vol 1112 ◽  
Author(s):  
Takafumi Fukushima ◽  
Tetsu Tanaka ◽  
Mitsumasa Koyanagi
Keyword(s):  
Self Assembly ◽  
Three Dimensional ◽  
The Self ◽  
High Yield ◽  
3D Integration ◽  
Integration Technology ◽  
Pick And Place ◽  
Assembly Technique ◽  
Self Assembled ◽  
Short Time

AbstractWe have demonstrated that a number of known good dies (KGDs) can be precisely aligned in batch and stacked on LSI wafers by our chip-to-wafer three-dimensional (3D) integration technology using an innovative self-assembly technique. Compared with conventional robotic pick-and-place chip assembly, the fluidic self-assembly can provide high-throughput chip alignment and bonding, and the resulting self-assembled chips have high alignment accuracy of approximately 0.3 micron on average. Immediately after chip release, the chips are aligned onto the predetermined hydrophilic bonding areas in a short time within 0.1 sec by the surface tension of aqueous liquid used in our self-assembly. By using the self-assembly, a number of KGDs with different chip sizes, different materials and different devices can be stacked in high yield to give highly integrated 3D chips we call the 3D Super Chip.

Nanoscale Self-Assembly Using Ion and Electron Beam Techniques: A Rapid Review

MRS Advances ◽  
2020 ◽  
Vol 5 (64) ◽  
pp. 3507-3520
Author(s):  
Chunhui Dai ◽  
Kriti Agarwal ◽  
Jeong-Hyun Cho
Keyword(s):  
Electron Beam ◽  
Self Assembly ◽  
Ion Beam ◽  
Three Dimensional ◽  
The Self ◽  
Stress Generation ◽  
Rapid Review ◽  
High Yield ◽  
3D Nanostructures ◽  
Self Assembled

AbstractNanoscale self-assembly, as a technique to transform two-dimensional (2D) planar patterns into three-dimensional (3D) nanoscale architectures, has achieved tremendous success in the past decade. However, an assembly process at nanoscale is easily affected by small unavoidable variations in sample conditions and reaction environment, resulting in a low yield. Recently, in-situ monitored self-assembly based on ion and electron irradiation has stood out as a promising candidate to overcome this limitation. The usage of ion and electron beam allows stress generation and real-time observation simultaneously, which significantly enhances the controllability of self-assembly. This enables the realization of various complex 3D nanostructures with a high yield. The additional dimension of the self-assembled 3D nanostructures opens the possibility to explore novel properties that cannot be demonstrated in 2D planar patterns. Here, we present a rapid review on the recent achievements and challenges in nanoscale self-assembly using electron and ion beam techniques, followed by a discussion of the novel optical properties achieved in the self-assembled 3D nanostructures.

Self-assembled three-dimensional hierarchical graphene hybrid hydrogels with ultrathin β-MnO2 nanobelts for high performance supercapacitors

2015 ◽  
Vol 3 (4) ◽  
pp. 1540-1548 ◽  
Author(s):  
Sheng Zhu ◽  
Hui Zhang ◽  
Ping Chen ◽  
Lin-Hui Nie ◽  
Chuan-Hao Li ◽  
...  
Keyword(s):  
Self Assembly ◽  
High Performance ◽  
Three Dimensional ◽  
The Self ◽  
Mass Loading ◽  
Hybrid Hydrogel ◽  
Precise Control ◽  
Ultrafine Structure ◽  
Hybrid Hydrogels ◽  
Self Assembled

A facile protocol for the self-assembly of the rGO/β-MnO2 hybrid hydrogel with ultrafine structure and precise control of mass-loading for high performance supercapacitors is reported.

Novel three-dimensional autologous tissue-engineered vaginal tissues using the self-assembly technique

2017 ◽  
Vol 180 ◽  
pp. 22-36 ◽  
Author(s):  
Hazem Orabi ◽  
Ingrid Saba ◽  
Alexandre Rousseau ◽  
Stéphane Bolduc
Keyword(s):  
Self Assembly ◽  
Three Dimensional ◽  
The Self ◽  
Autologous Tissue ◽  
Assembly Technique

scholarly journals Frustrated self-assembly of non-Euclidean crystals of nanoparticles

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Francesco Serafin ◽  
Jun Lu ◽  
Nicholas Kotov ◽  
Kai Sun ◽  
Xiaoming Mao
Keyword(s):  
Self Assembly ◽  
Three Dimensional ◽  
Building Blocks ◽  
The Self ◽  
High Yield ◽  
Complex Structures ◽  
Interparticle Interactions ◽  
Viral Capsids ◽  
Self Organized ◽  
New Material

AbstractSelf-organized complex structures in nature, e.g., viral capsids, hierarchical biopolymers, and bacterial flagella, offer efficiency, adaptability, robustness, and multi-functionality. Can we program the self-assembly of three-dimensional (3D) complex structures using simple building blocks, and reach similar or higher level of sophistication in engineered materials? Here we present an analytic theory for the self-assembly of polyhedral nanoparticles (NPs) based on their crystal structures in non-Euclidean space. We show that the unavoidable geometrical frustration of these particle shapes, combined with competing attractive and repulsive interparticle interactions, lead to controllable self-assembly of structures of complex order. Applying this theory to tetrahedral NPs, we find high-yield and enantiopure self-assembly of helicoidal ribbons, exhibiting qualitative agreement with experimental observations. We expect that this theory will offer a general framework for the self-assembly of simple polyhedral building blocks into rich complex morphologies with new material capabilities such as tunable optical activity, essential for multiple emerging technologies.

Graphene oxide-based composite hydrogels with self-assembled macroporous structures

RSC Advances ◽  
2016 ◽  
Vol 6 (5) ◽  
pp. 3561-3570 ◽  
Author(s):  
Yiwan Huang ◽  
Ming Zeng ◽  
Zijian Feng ◽  
Die Yin ◽  
Qingyu Xu ◽  
...  
Keyword(s):  
Graphene Oxide ◽  
Self Assembly ◽  
The Self ◽  
Simple Route ◽  
Composite Hydrogels ◽  
Assembly Technique ◽  
Self Assembled

The self-assembly technique provides a new and simple route for designing porous hydrogels.

scholarly journals Statistical reprogramming of macroscopic self-assembly with dynamic boundaries

2020 ◽  
Vol 117 (21) ◽  
pp. 11306-11313
Author(s):  
Utku Culha ◽  
Zoey S. Davidson ◽  
Massimo Mastrangeli ◽  
Metin Sitti
Keyword(s):  
Self Assembly ◽  
Control Strategies ◽  
Three Dimensional ◽  
The Self ◽  
Robotic Assembly ◽  
Large Set ◽  
Stable States ◽  
Finite Set ◽  
Self Assembled ◽  
Boundary Regulation

Self-assembly is a ubiquitous process that can generate complex and functional structures via local interactions among a large set of simpler components. The ability to program the self-assembly pathway of component sets elucidates fundamental physics and enables alternative competitive fabrication technologies. Reprogrammability offers further opportunities for tuning structural and material properties but requires reversible selection from multistable self-assembling patterns, which remains a challenge. Here, we show statistical reprogramming of two-dimensional (2D), noncompact self-assembled structures by the dynamic confinement of orbitally shaken and magnetically repulsive millimeter-scale particles. Under a constant shaking regime, we control the rate of radius change of an assembly arena via moving hard boundaries and select among a finite set of self-assembled patterns repeatably and reversibly. By temporarily trapping particles in topologically identified stable states, we also demonstrate 2D reprogrammable stiffness and three-dimensional (3D) magnetic clutching of the self-assembled structures. Our reprogrammable system has prospective implications for the design of granular materials in a multitude of physical scales where out-of-equilibrium self-assembly can be realized with different numbers or types of particles. Our dynamic boundary regulation may also enable robust bottom-up control strategies for novel robotic assembly applications by designing more complex spatiotemporal interactions using mobile robots.

scholarly journals Self-Assembly of Shape-Tunable Oblate Colloidal Particles into Orientationally Ordered Crystals, Glassy Crystals and Plastic Crystals

Soft Matter ◽  
2021 ◽  
Author(s):  
Jiawei Lu ◽  
Xiangyu Bu ◽  
Xinghua Zhang ◽  
Bing Liu
Keyword(s):  
Crystal Structures ◽  
Self Assembly ◽  
Colloidal Particles ◽  
Building Blocks ◽  
Fundamental Question ◽  
The Self ◽  
Plastic Crystals ◽  
Self Assembled ◽  
Glassy Crystals ◽  
The Relationship

The shapes of colloidal particles are crucial to the self-assembled superstructures. Understanding the relationship between the shapes of building blocks and the resulting crystal structures is an important fundamental question....

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