Synthesis and Characterization of Diamond-Like Carbon Films using Ion Beam Technique

MRS Proceedings ◽

10.1557/proc-152-33 ◽

1989 ◽

Vol 152 ◽

Cited By ~ 2

Author(s):

Richard L. C. Wu

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Substrate Material ◽

Diamond Like Carbon ◽

Source Pressure ◽

Environmental Testing ◽

Deposition Parameters ◽

Proton Recoil ◽

Ion Impact

ABSTRACTDiamond-like carbon (DLC) coatings have been deposited on several infrared transmitting substrates utilizing the ion beam deposition technique. Optimum deposition parameters have been established as a function of source gas composition, source pressure, ion-impact energy, substrate material and cleaning substrate procedures. Extensive characterization of the DLC films was also performed. Rutherford backscattering and proton recoil techniques were used to analyze carbon and hydrogen content and impurities. These films contain 70% atomic carbon and 30% atomic hydrogen. Transmission electron microscopy was used to analyze the crystallinity, void structure and surface microstructure, which were found to be amorphous and dense. Optical properties, such as refractive index and extinction coefficient, were measured using transmission/reflection spectroscopy, ellipsometry and laser calorimetry. Environmental testing was performed using various acids and solvents. The thermal stability and moisture penetration on these DLC films were extensively investigated. The effect of high ion energy radiation on DLC films was studied. Details of the preparation method and characterization of DLC films are presented.

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Characterization of Hard Diamond-Like Carbon Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.4295 ◽

2002 ◽

Vol 41 (Part 1, No. 6B) ◽

pp. 4295-4298 ◽

Cited By ~ 40

Author(s):

Kazuhiro Kanda ◽

Teruyuki Kitagawa ◽

Yutaka Shimizugawa ◽

Yuichi Haruyama ◽

Shinji Matsui ◽

...

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Cluster Ion ◽

Gas Cluster Ion Beam ◽

Ar Gas

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Characterization of ion-beam-deposited diamond-like carbon films

Thin Solid Films ◽

10.1016/0040-6090(95)06912-7 ◽

1995 ◽

Vol 270 (1-2) ◽

pp. 165-172 ◽

Cited By ~ 54

Author(s):

V. Palshin ◽

E.I. Meletis ◽

S. Ves ◽

S. Logothetidis

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon

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Characterization of ion-beam-deposited diamond-like carbon films

Diamond and Related Materials ◽

10.1016/0925-9635(93)90126-m ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 584-589 ◽

Cited By ~ 5

Author(s):

V. Liebler ◽

H. Baumann ◽

K. Bethge

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon

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Synthesis of Diamond Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga-ion Beam Implantation

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.137.584 ◽

2017 ◽

Vol 137 (10) ◽

pp. 584-589

Author(s):

Satoshi Kurumi ◽

Yusuke Takahara ◽

Takafumi Ohno ◽

Ken-ichi Matsuda ◽

Kaoru Suzuki

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Ion Beam Implantation ◽

Vapor Method

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An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

MRS Proceedings ◽

10.1557/proc-719-f8.36 ◽

2002 ◽

Vol 719 ◽

Author(s):

Myoung-Woon Moon ◽

Kyang-Ryel Lee ◽

Jin-Won Chung ◽

Kyu Hwan Oh

Keyword(s):

Cross Sections ◽

Focused Ion Beam ◽

Imaging System ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Glass Substrates ◽

Atomic Force ◽

Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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Characterization of Ultra-Thin Diamond-Like Carbon Films by SEM/EDX

Coatings ◽

10.3390/coatings11060729 ◽

2021 ◽

Vol 11 (6) ◽

pp. 729

Author(s):

Chanida Puttichaem ◽

Guilherme P. Souza ◽

Kurt C. Ruthe ◽

Kittipong Chainok

Keyword(s):

Regression Models ◽

Hard Disk Drives ◽

Carbon Films ◽

Diamond Like Carbon ◽

Disk Drives ◽

Cross Sectional ◽

Protective Films ◽

High Throughput Method ◽

Multiple Regression Models

A novel, high throughput method to characterize the chemistry of ultra-thin diamond-like carbon films is discussed. The method uses surface sensitive SEM/EDX to provide substrate-specific, semi-quantitative silicon nitride/DLC stack composition of protective films extensively used in the hard disk drives industry and at Angstrom-level. SEM/EDX output is correlated to TEM to provide direct, gauge-capable film thickness information using multiple regression models that make predictions based on film constituents. The best model uses the N/Si ratio in the films, instead of separate Si and N contributions. Topography of substrate/film after undergoing wear is correlatively and compositionally described based on chemical changes detected via the SEM/EDX method without the need for tedious cross-sectional workflows. Wear track regions of the substrate have a film depleted of carbon, as well as Si and N in the most severe cases, also revealing iron oxide formation. Analysis of film composition variations around industry-level thicknesses reveals a complex interplay between oxygen, silicon and nitrogen, which has been reflected mathematically in the regression models, as well as used to provide valuable insights into the as-deposited physics of the film.

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Large Area Surface Treatment by Ion Beam Technology

MRS Proceedings ◽

10.1557/proc-438-611 ◽

1996 ◽

Vol 438 ◽

Cited By ~ 2

Author(s):

R. L. C. Wu ◽

W. Lanter

Keyword(s):

Ion Beam ◽

High Vacuum ◽

Polycrystalline Diamond ◽

Carbon Films ◽

Ultra High Vacuum ◽

Diamond Like Carbon ◽

Chemical Compositions ◽

Rf Power ◽

Large Area ◽

Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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