Enhanced Hydrogen Diffusion Under Illumination in Hydrogenated Amorphous Silicon

1992 ◽  
Vol 258 ◽  
Author(s):  
P.V. Santos ◽  
N.M. Johnson ◽  
R.A. Street

ABSTRACTWe provide experimental evidence for the fact that hydrogen diffusion in hydroge-nated amorphous silicon is controlled by the concentration of electronic carriers. It is experimentally demonstrated that the hydrogen diffusion coefficient (a) is enhanced if the carrier population is increased by illumination and (b) is strongly suppressed if carriers are extracted from the diffusion region by the application of an electric field.

2015 ◽  
Vol 29 (14) ◽  
pp. 1550083 ◽  
Author(s):  
Harumi Hikita ◽  
Kazuo Morigaki

The diffusion coefficient of hydrogen is obtained for exponential energy distribution in hydrogenated amorphous silicon (a-Si:H). It is shown that the diffusion coefficient follows the form of τα-1 (τ: diffusion time) in the case of α < 1 and a larger τ, in which α is the ratio of hydrogen temperature to width for energy distribution function. In the case of α ≥ 1, as α reaches infinity at the limit, the hydrogen diffusion approaches Brownian motion.


1993 ◽  
Vol 297 ◽  
Author(s):  
Hitoshi Nishio ◽  
Gautam Ganguly ◽  
Akihisa Matsuda

We present a method to reduce the defect density in hydrogenated amorphous silicon (a-Si:H) deposited at low substrate temperatures similar to those used for device fabrication . Film-growth precursors are energized by a heated mesh to enhance their surface diffusion coefficient and this enables them to saturate more surface dangling bonds.


1992 ◽  
Vol 258 ◽  
Author(s):  
Sufi Zafar ◽  
E. A. Schiff

ABSTRACTA model for correlating the observed properties of hydrogenated amorphous silicon (a-Si:H) with the underlying hydrogen microstructure is reviewed. The model provides a unified description of defect equilibration, hydrogen evolution, rehydrogenation and hydrogen diffusion measurements.


1992 ◽  
Vol 283 ◽  
Author(s):  
Masanori Otobe ◽  
Shunri Oda

ABSTRACTWe have investigated nucleation and growth mechanism of nanocrystalline silicon (nc-Si) based on the experimental observation of plan-view transmission electron microscopy. Nanocrystalline Si has been prepared by hydrogen radical annealing of hydrogenated amorphous silicon (a-Si:H) layer, which is deposited on hydrogen radical treated a-Si:H buffer layer. Nanocrystallization depends critically upon hydrogen radical annealing time and the thickness ofa-Si:H layer. Hydrogen radicals play important roles in both nucleation and growth processes in a different way. Growth of nc-Si can be explained by “hydrogen diffusion model”, in which hydrogen radicals diffusing through a-Si:H layer to interface cause nanocrystallization. Our results imply that nuclei for nc-Si are generated at the interface between a-Si:H and under layer when treated by hydrogen radicals.


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