The Effect of Hydrogen Treatment on Electrical Properties of AIGaAsSb
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ABSTRACTThe effect of hydrogen treatment at 200°C on the concentration of electrically active defects in LPE grown AIGaAsSb is reported. In n-type layers the electrical properties are shown to be dominated by DX-like deep donors of three different types all of which are strongly passivated by the hydrogen treatment as evidenced by C-V. DLTS C-T and spreading resistance measurements. In p-type layers intrinsic acceptors of defect origin are also passivated by hydrogen. Deuterium profiles in both n- and p-type layers show characteristic plateaus indicative of formation of neutral compexes between hydrogen and dopants. Hydrogen treatment also leads to decrease of the Au/n-AIGaAsSb Schottky barrier height from 1.3 to 0.85 eV.
2012 ◽
Vol 51
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pp. 09MK01
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2012 ◽
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pp. 09MK01
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2017 ◽
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pp. 085007
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2008 ◽
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pp. 095107
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2006 ◽
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pp. 923-926
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1991 ◽
Vol 34
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pp. 51-55
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