Characterization of Defect Structures in SiC Single Crystals Using Synchrotron X-Ray Topography

1993 ◽  
Vol 307 ◽  
Author(s):  
S. Wang ◽  
M. Dudley ◽  
C. Carter ◽  
D. Asbury ◽  
C. Fazit
Keyword(s):  
Detailed Analysis ◽  
Single Crystals ◽  
Basal Plane ◽  
Defect Structures ◽  
Dislocation Generation ◽  
Screw Dislocations ◽  
X Ray ◽  
White Beam

ABSTRACTSynchrotron white beam X-ray topography has been used to characterize defect structures in 6H-SiC wafers grown on (0001) seeds. Two major types of defects are observed: super screw dislocations approximately perpendicular to the basal plane and dislocation networks lying in the basal plane. The super screw dislocations, which have open cores, are growth dislocations. These dislocations act as sources and/or sinks for the glide dislocation networks. Detailed analysis and discussion of dislocation generation phenomena and Burgers vectors will be presented.

Characterization of Defect Structures in Lely 6H-SiC Single Crystals Using Synchrotron White Beam X-Ray Topography

1994 ◽  
Vol 375 ◽  
Author(s):  
W. Huang ◽  
S. Wang ◽  
M. Dudley ◽  
P. Neudeck ◽  
J. A. Powell ◽  
...  
Keyword(s):  
Single Crystals ◽  
Basal Plane ◽  
Stacking Faults ◽  
Defect Structures ◽  
Dislocation Generation ◽  
X Ray ◽  
Partial Dislocations ◽  
White Beam ◽  
Generation Mechanisms

AbstractDefect structures in Lely SiC single crystals have been studied using synchrotron white beam X-ray topography. Basal plane dislocations and stacking faults probably generated during post-growth cooling are clearly revealed. For both perfect dislocations and partial dislocations bounding the stacking faults, Burgers vectors and line directions are determined from contrast extinction analysis as well as projected direction analysis on different topographic images. The fault planes and fault vectors of the stacking faults were determined using contrast extinction analysis. Possible dislocation generation mechanisms are briefly discussed.

Characterization of Defect Structures in 3C-SiC Single Crystals Using Synchrotron White Beam X-ray Topography

1996 ◽  
Vol 423 ◽  
Author(s):  
W. Huang ◽  
M. Dudley ◽  
C. Fazi
Keyword(s):  
Single Crystals ◽  
Stacking Faults ◽  
Interference Microscopy ◽  
Defect Structures ◽  
Growth Sector ◽  
X Ray ◽  
Partial Dislocations ◽  
White Beam ◽  
Transmission And Reflection

AbstractDefect structures in (111) 3C-SiC single crystals, grown using the Baikov technique, have been studied using Synchrotron White Beam X-ray Topography (SWBXT). The major types of defects include complex growth sector boundary structures, double positioning twins, stacking faults on { 111 } planes, inclusions and dislocations (including growth dislocations and partial dislocations bounding stacking faults). Detailed stacking fault and double positioning twin configurations are determined using a combination of Nomarski interference microscopy, SEM and white beam x-ray topography in both transmission and reflection geometries. Possible defect generation phenomena are discussed.

X-Ray Topographic Studies of Defects in PVT 6H-SiC Substrates and Epitaxial 6H-SiC Thin Films

1994 ◽  
Vol 339 ◽  
Author(s):  
S. Wang ◽  
M. Dudley ◽  
C. H. Carter ◽  
H. S. Kong
Keyword(s):  
Thin Films ◽  
Basal Plane ◽  
Vapor Transport ◽  
Physical Vapor Transport ◽  
Epitaxial Thin Films ◽  
Defect Structures ◽  
Screw Dislocations ◽  
X Ray ◽  
Back Reflection ◽  
White Beam

ABSTRACTSynchrotron white beam X-ray topography has been used to characterize defect structures in (0001) 6H-SiC substrates grown by the sublimation physical vapor transport (PVT) technique as well as in 6H-SiC epitaxial thin films grown on these substrates. Defects revealed in 6H-SiC substrates include super screw dislocations and basal plane dislocations. It has been found that back-reflection topographs are particularly suitable for imaging such super screw dislocations as well as basal plane dislocations whenever transmission topography is not applicable. Epitaxial 6H-SiC thin films grown on such (0001) substrates (tilted a few degrees towards the a-axis) were also examined by using surface sensitive grazing Bragg-Laue topography. It has been shown that super screw dislocations were replicated in the epitaxial thin films but no basal plane dislocations were revealed in the thin films. Results from various topographic techniques are discussed.

Characterization of structural defects in MLEK grown InP single crystals using synchrotron white beam X-ray topography

1997 ◽  
Vol 174 (1-4) ◽  
pp. 230-237 ◽  
Author(s):  
H. Chung ◽  
W. Si ◽  
M. Dudley ◽  
A. Anselmo ◽  
D.F. Bliss ◽  
...  
Keyword(s):  
Single Crystals ◽  
Structural Defects ◽  
X Ray ◽  
White Beam

Synchrotron X-Ray Topographic Study of Defects in High Quality, Flux Grown Ktiopo4 Single Crystals

1993 ◽  
Vol 307 ◽  
Author(s):  
S. Wang ◽  
M. Dudley ◽  
L. K. Cheng ◽  
J. D. Bierlein
Keyword(s):  
Detailed Analysis ◽  
Single Crystals ◽  
Domain Walls ◽  
Defect Structures ◽  
Growth Sector ◽  
High Quality ◽  
X Ray ◽  
Free Region ◽  
Ferroelectric Domains ◽  
Section Topography

ABSTRACTDefect structures in large, high quality flux-grown KTP single crystals have been studied by using synchrotron white beam X-ray topography. Growth dislocations, inclusions, growth sector boundaries, growth bands and surface micro-scratches were imaged. A number of planar defects in the dislocation-free region are imaged and determined to be inversion twin lamellae (lamellar ferroelectric domains) which have never been previously reported in KTP crystals. These inversion twin lamellae were also studied by section topography. Detailed analysis of observed contrast revealed that the domain walls bounding the lamellae are faulted with a fault vector of ½[0±1±1]. This fault vector seems to be consistent with the atomic structure of KTP. A detailed analysis is presented and discussed.

Synchrotron White Beam Topography Studies of Screw Dislocations in 6H-Sic Single Crystals

1994 ◽  
Vol 375 ◽  
Author(s):  
S. Wang ◽  
M. Dudley ◽  
C. H. Carter ◽  
V. F. Tsvetkov ◽  
C. Fazi
Keyword(s):  
Single Crystals ◽  
Structural Defects ◽  
Device Performance ◽  
Topographic Image ◽  
X Ray Diffraction ◽  
Screw Dislocations ◽  
X Ray ◽  
White Beam ◽  
Line Defects ◽  
Kinematical Theory

AbstractSynchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as “micropipes”, were studied extensively. Detailed analysis of topographic image contrast associated with “micropipes”, based on the kinematical theory of X-ray diffraction, established that the so-called “micropipes” are screw dislocations with large Burgers vectors.

Deflection of Threading Dislocations with Burgers Vector c/c+a Observed in 4H-SiC PVT–Grown Substrates with Associated Stacking Faults

2012 ◽  
Vol 717-720 ◽  
pp. 347-350 ◽  
Author(s):  
Sha Yan Byrapa ◽  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Balaji Raghothamachar ◽  
Gloria Choi ◽  
...  
Keyword(s):  
Detailed Analysis ◽  
Basal Plane ◽  
Stacking Faults ◽  
Image Contrast ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
Calculated Phase ◽  
X Ray ◽  
White Beam ◽  
Contrast Studies

A review is presented of Synchrotron White Beam X-ray Topography (SWBXT) studies of stacking faults observed in PVT-Grown 4H-SiC crystals. A detailed analysis of various interesting phenomena were performed and one such observation is the deflection of threading dislocations with Burgers vector c/c+a onto the basal plane and associated stacking faults. Based on the model involving macrostep overgrowth of surface outcrops of threading dislocations, SWBXT image contrast studies of these stacking faults on different reflections and comparison with calculated phase shits for postulated fault vectors, has revealed faults to be of basically four types: (a) Frank faults; (b) Shockley faults; (c) Combined Shockley + Frank faults with fault vector s+c/2; (d) Combined Shockley + Frank faults with fault vector s+c/4.

Determination of Burgers Vector of Screw Dislocations in 6H-SiC Single Crystals by Synchrotron White Beam X-Ray Topography

1996 ◽  
Vol 437 ◽  
Author(s):  
W. Si ◽  
M. Dudley ◽  
C. Carter ◽  
R. Glass ◽  
V. Tsvetkov
Keyword(s):  
Single Crystals ◽  
Dislocation Core ◽  
Line Defect ◽  
Screw Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
White Beam ◽  
Lattice Planes ◽  
Vector Magnitude

AbstractIndividual screw dislocations along the [0001] axis in 6H-SiC single crystals have been characterized by means of Synchrotron White Beam X-ray Topography (SWBXT). The magnitude of the Burgers vector was determined from: (1) the diameter of circular diffraction-contrast images of dislocations in back-reflection topographs, (2) the width of bi-modal images associated with screw dislocations in transmission topographs, (3) the magnitude of the tilt of the lattice planes on both sides of dislocation core in projection topographs, and (4) also the magnitude of the tilt of the lattice planes in section topographs. All of the four methods showed reasonable consistency. The sense of the Burgers vector can also be deduced from the abovementioned tilt of the lattice planes. Results revealed that in 6H-SiC a variety of screw dislocations can be found with Burgers vector magnitude ranging from 1c to 7c (c is the lattice constant along [0001] axis). This work demonstrates that SWBXT can be used as a quantitative technique for detailed analyses of line defect configurations.

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