Microstructural Evolution and Stress Relaxation in Sputtered Tungsten Films
Keyword(s):
Β Phase
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ABSTRACTWe have investigated the relationship between microstructure and stress in very thin sputtered W films. We discuss features of the microstructure, in particular the presence of voids in compressively stressed films, in terms of the evolution of the structure from a metastable β-phase. By developing a novel specimen geometry for the transmission electron microscope (TEM), we present dynamic observations of the β-W→α-W transformation.
1974 ◽
Vol 32
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pp. 214-215
1969 ◽
Vol 27
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pp. 238-239
1969 ◽
Vol 27
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pp. 176-177
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1978 ◽
Vol 36
(1)
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pp. 540-541
1978 ◽
Vol 36
(1)
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pp. 510-511
1978 ◽
Vol 36
(1)
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pp. 466-467