Liquid Delivery of Low Vapor Pressure MOCVD Precursors

1993 ◽  
Vol 335 ◽  
Author(s):  
R. A. Gardiner ◽  
P. C. Van buskirk ◽  
P. S. Kirlin
Keyword(s):  
Organic Medium ◽  
Advanced Materials ◽  
Single Source ◽  
Liquid Precursors ◽  
Material Systems ◽  
Mocvd Precursors ◽  
Gaseous Form ◽  
Simultaneous Delivery ◽  
Cation Ratio ◽  
C Nmr

AbstractA significant limitation in MOCVD processing of advanced materials is the ability to deliver low volatility precursors, in a repeatable fashion, to the deposition reactor. Apparatus for delivering low volatility precursors in gaseous form, wherein a precursor source liquid is flash vaporized at elevated temperature has been developed. Stable, reproducible delivery of liquid precursors for TiN and Ta2O5 has been demonstrated. For multicomponent ceramic material systems simultaneous delivery of multiple cation species via a single source liquid has been achieved. The effect of flash vaporization on precursors for PZT was investigated. Pb, Zr and Ti precursors were dissolved in an organic medium with a defined cation ratio. The source solution was vaporized, the precursors transported as vapor then collected and analyzed by 1H and 13C nmr. No decomposition of the precursors was observed post vaporization and source solution stoichiometry was maintained in the collected material. The use of this flash vaporization technique has already been particularly successful for MOCVD of BaTiO3, MgAl2O4, YBa2Cu3O7−x, YSZ, LaSrCoO3 and Cu metal.

Preparation and characterization of some alumosiloxanes as single-source MOCVD precursors for aluminosilicate coatings

2000 ◽  
Vol 10 (PR2) ◽  
pp. Pr2-35-Pr2-42
Author(s):  
S. M. Zemskova ◽  
J. A. Haynes ◽  
T. M. Besmann ◽  
R. D. Hunt ◽  
D. B. Beach ◽  
...  
Keyword(s):  
Single Source ◽  
Mocvd Precursors

Pyrolysis Studies of Single-Source Precursors to Gallium Phosphide

1992 ◽  
Vol 282 ◽  
Author(s):  
Kenneth E. Lee ◽  
Charlotte K. Lowe-Ma ◽  
Kelvin T. Higa
Keyword(s):  
Emission Spectroscopy ◽  
Gallium Phosphide ◽  
Film Growth ◽  
Single Source ◽  
Gas Analyzer ◽  
X Ray ◽  
Residual Gas ◽  
By Products ◽  
Deposited Films ◽  
C Nmr

ABSTRACTNew dialkylgallium dialkylphosphide compounds having the formula [(t- Bu)(R)GaPR'2]n (R = t-Bu, Me3SiC=C; R' = t-Bu, i-Pr, Et; n = 1, 2) were recently prepared and characterized. When R = R' = t-Bu, the compound is a low melting, monomeric solid. The other compounds are dimeric solids with the unsym-metrical acetylides occurring as cis and trans isomers. Polycrystalline gallium phosphide was deposited from these sources on silicon atlow pressure (0.05–0.1 Torr) and low temperature (350–600 °C) in a horizontal OMVPE reactor. The film growth was monitored by a residual gas analyzer and the by-products were trapped (N2(1)) to be later analyzed by 1H and 13C NMR. The deposited films were characterized by Raman spectroscopy, X-ray powder diffraction, and Auger emission spectroscopy.

NETL Research Efforts on Development and Integration of Advanced Material Systems and Airfoil Cooling Configurations for Future Land-Based Gas Turbine Engines

2014 ◽  
Author(s):  
M. A. Alvin ◽  
J. Klinger ◽  
B. McMordie ◽  
M. Chyu ◽  
S. Siw ◽  
...  
Keyword(s):  
Gas Turbine ◽  
Film Cooling ◽  
Low Cost ◽  
Oxide Dispersion Strengthened ◽  
Advanced Materials ◽  
Turbine Engines ◽  
Internal Cooling ◽  
Gas Turbine Engines ◽  
Near Surface ◽  
Material Systems

As future land-based gas turbine engines are being designed to operate with inlet temperatures exceeding 1300°C (2370°F), efforts at NETL have been focused on developing advanced materials systems that are integrated with novel airfoil cooling architectures. Recent achievements in the areas of low cost diffusion bond coat systems applied to single- and poly-crystalline nickel-based superalloys, as well as development of thin nickel-based oxide dispersion strengthened layers are presented in this paper. Integration of these material systems with commercially cast, novel, pin-fin internal cooling airfoil arrays, tripod film cooling hole architectures, trailing edge cooling geometries, and near surface micro-channel concepts is also presented.

CVD of SiC and AlN Using Cyclic Organometallic Precursors

1991 ◽  
Vol 250 ◽  
Author(s):  
L. V. Interrante ◽  
D. J. Larkin ◽  
C. Amato
Keyword(s):  
Gas Phase ◽  
Molecular Beam ◽  
Parent Compound ◽  
Single Source ◽  
The Core ◽  
Organometallic Molecules ◽  
Mocvd Precursors ◽  
Organometallic Precursors ◽  
Source Materials ◽  
Sic Films

AbstractThe use of cyclic organometallic molecules as single-source MOCVD precursors is illustrated by means of examples taken from our recent work on SiC and AlN deposition, with particular focus on SiC. Molecules containing (SiC)2 and (AlN)3 rings as the “core structure” were employed as the source materials for these studies. The organoaluminum amide, [Me2AlNH2]3, was used as the AlN source and has been studied in a molecular beam sampling apparatus in order to determine the gas phase species present in a hot-wall CVD reactor environment. In the case of SiC CVD, a series of disilacyclobutanes, [Si(XX′)CH2]2 (with X and X′ - H, CH3 , and CH2 SiH2CH3), were examined in a cold-wall, hot-stage CVD reactor in order to compare their relative reactivities and prospective utility as single-source CVD precursors. The parent compound, disilacyclobutane, [SiH2 CH2]2, was found to exhibit the lowest deposition temperature (ca. 670 °C) and to yield the highest purity SiC films. This precursor gave a highly textured, polycrystalline film on the Si(100) substrates (70% with a SiC<lll> orientation).

Progress for Dynamic Emissivity Regulation: Control Methods, Material Systems, and Applications

2021 ◽  
Author(s):  
Ziqi Li ◽  
Wei Chen
Keyword(s):  
Advanced Materials ◽  
Control Methods ◽  
Thermal Emissivity ◽  
Material Systems ◽  
Thermal Detection

Advanced materials with tailored thermal emissivity underpin the performance of many technologies, including thermal detection, spacecraft components, and camouflage platforms. The thermal emissivity of materials can be modified through surface...

Synthesis and characterization of Hf–Al heterometallic aminoalkoxides as single-source MOCVD precursors for hafnium aluminate films

Polyhedron ◽  
2006 ◽  
Vol 25 (2) ◽  
pp. 293-299 ◽  
Author(s):  
Liliane G. Hubert-Pfalzgraf ◽  
Adulfas Abrutis ◽  
Sergej Pasko ◽  
Nadia Touati ◽  
Dominique Luneau
Keyword(s):  
Synthesis And Characterization ◽  
Single Source ◽  
Mocvd Precursors

Coaxial Electrospinning for Nanostructured Advanced Materials

2006 ◽  
Vol 948 ◽  
Author(s):  
Ignacio G. Loscertales ◽  
Juan E. Díaz Gómez ◽  
M. Lallave ◽  
J. M. Rosas ◽  
Jorge Bedia ◽  
...  
Keyword(s):  
Carbon Nanofibers ◽  
Size Range ◽  
Advanced Materials ◽  
Biocompatible Polymers ◽  
Coaxial Electrospinning ◽  
Liquid Precursors ◽  
Hollow Carbon ◽  
Nanometric Size

ABSTRACTElectro-hydro-dynamic (EHD) compound jets, with diameters in the micro and nanometric size range, from conical menisci of two co-flowing liquids, is a consolidated platform for the production of nanofibers with inner structure, in a process so-called coaxial electrospinning or co-electrospinning. In contrast to other multi-step template based procedures, the EHD methodology is much more simple and general since, firstly, a solid template is needless and, secondly, the process is seldom affected by the chemistry of the liquids. This gentle process allows selecting the liquid precursors depending on the application sought for the nanofibers. Here, we review different products obtained by this EHD technique: (1) solid and hollow carbon nanofibers from different precursors (polyacrylonitrile, polyvinylpyrrolidone and lignin), (2) nanofibers of biocompatible polymers encapsulating liquids in the form of beads, (3) spinning nanofibers of alginate and (4) in-fiber encapsulation of active microgels.

In pursuit of advanced materials from single-source precursors based on metal carbonyls

2019 ◽  
Vol 48 (7) ◽  
pp. 2248-2262 ◽  
Author(s):  
Kenton H. Whitmire ◽  
Desmond E. Schipper
Keyword(s):  
Solid State ◽  
Multiple Source ◽  
Advanced Materials ◽  
Single Source ◽  
Metal Carbonyls ◽  
Single Source Precursors ◽  
Solid State Materials

In this perspective, the development of single-source precursors and their relative advantages over multiple source approaches for the synthesis of metal pnictide solid state materials is explored.

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