Hydrogen-Induced Metastability of Polycrystalline Silicon
Keyword(s):
AbstractThe presence of H in polycrystalline silicon gives rise to new and hitherto unexpected phenomena. In this paper two of the most recent observations are reviewed: (i) Hydrogen-induced metastable changes of the dark conductivity due to the formation and dissociation of an electrically active H complex and (ii) the generation of acceptor states during prolonged exposure of poly-Si to monatomic H at elevated temperatures. The observed type conversion is clearly due to the diffusion of excess H from the plasma since it does not occur during exposure to other species such as oxygen.
2015 ◽
Vol 816
◽
pp. 586-593
◽
1975 ◽
Vol 51
(2)
◽
pp. 157-164
◽
2008 ◽
Vol 73
(7)
◽
pp. 1676-1689
◽