Application of Plasma Anodization Technique to Device Fabrication

1984 ◽  
Vol 38 ◽  
Author(s):  
Takuo Sugano
Keyword(s):  
Low Temperature ◽  
Electric Field ◽  
Selective Oxidation ◽  
Oxidation Process ◽  
Stacking Faults ◽  
Device Fabrication ◽  
Native Oxide ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Inp Substrates

AbstractApplications of plasma anodization technique to Si, GaAs and InP dev-ices fabrication, demonstrated by the author's group, are reviewed. The feature of the technique is an electric field enhanced low temperature oxidation process. Suppression of the generation of oxidation induced stacking faults, the redistribution of impurities in the substrates and the bird's beak formation in selective oxidation process is an advantage in silicon technology. It must be stressed that plasma anodization is only one technique which has been proved to be successful in growing native oxide films on InP substrates for MISFETs fabrication.

Low Temperature Oxidation of Benzene Over Pd/Co3O4 Catalysts in the Electric Field

2020 ◽  
Author(s):  
Feixiang Shen ◽  
Ke Li ◽  
Xuteng Zhao ◽  
Xiaobo Li ◽  
Ting Chen ◽  
...  
Keyword(s):  
Low Temperature ◽  
Electric Field ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Oxidation Of Benzene

Study on the change of organic sulfur forms in coal during low-temperature oxidation process

Fuel ◽  
2018 ◽  
Vol 222 ◽  
pp. 350-361 ◽  
Author(s):  
Lanjun Zhang ◽  
Zenghua Li ◽  
Wenjing He ◽  
Jinhu Li ◽  
Xuyao Qi ◽  
...  
Keyword(s):  
Low Temperature ◽  
Oxidation Process ◽  
Organic Sulfur ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation

Study on Low-Temperature Oxidation Process of Low Rank Coal by In Situ FTIR

2013 ◽  
Vol 652-654 ◽  
pp. 871-876 ◽  
Author(s):  
Xiao Xing Zhong ◽  
Guo Lan Dou ◽  
Hai Hui Xin ◽  
De Ming Wang
Keyword(s):  
Low Temperature ◽  
Functional Groups ◽  
Oxidation Process ◽  
Low Rank ◽  
In Situ Ftir ◽  
Low Rank Coal ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Low Temperature Process

Low temperature oxidation of two different low rank coals was measured by in-situ FTIR. Curve-fitting analysis was employed to identify functional groups types of raw coals, and series technology was carried out on in-situ infrared spectrum of sample coals at low-temperature oxidation process to analyze the changes of main active functional groups with temperature. The results indicate that -CH3, -CH2, -OH, C=O, COOH are the main active functional groups in low rank coal. In the oxidation process, with temperature increasing, the methyl and methylene show the tendency of increase after decrease and then decrease, and all of hydroxyl, carboxyl and carbonyl group present the tendency of increase after decrease, there exists some differences among the main functional groups in the coal low-temperature process.

Dependence of SiO2/Si interface structure on low-temperature oxidation process

2004 ◽  
Vol 234 (1-4) ◽  
pp. 197-201 ◽  
Author(s):  
T Hattori ◽  
K Azuma ◽  
Y Nakata ◽  
M Shioji ◽  
T Shiraishi ◽  
...  
Keyword(s):  
Low Temperature ◽  
Oxidation Process ◽  
Interface Structure ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation

Neutron Diffraction Study of the Structural Changes Occurring During the Low Temperature Oxidation of UO2

2009 ◽  
Vol 1215 ◽  
Author(s):  
Gianguido Baldinozzi ◽  
Lionel Desgranges ◽  
Gurvan Rousseau
Keyword(s):  
Low Temperature ◽  
Neutron Diffraction ◽  
Uranium Dioxide ◽  
Oxidation Process ◽  
Structural Parameters ◽  
Atomic Scale ◽  
Uranium Oxides ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Diffraction Patterns

AbstractThe oxidation of uranium dioxide has been studied for more than 50 years. It was first studied for fuel fabrication purposes and then later on for safety reasons to design a dry storage facility for spent nuclear fuel that could last several hundred years. Therefore, understanding the changes occurring during the oxidation process is essential, and a sound prediction of the behavior of uranium oxides requires the accurate description of the elementary mechanisms on an atomic scale. Only the models based on elementary mechanisms should provide a reliable extrapolation of laboratory results over timeframes spanning several centuries. The oxidation mechanism of uranium oxides requires understanding the structural parameters of all the phases observed during the process. Uranium dioxide crystal structure undergoes several modifications during the low temperature oxidation that transforms UO2 into U3O8. The symmetries and the structural parameters of UO2, β-U4O9, β-U3O7 and U3O8 were determined by refining neutron diffraction patterns on pure single-phase samples. Neutron diffraction patterns, collected during the in situ oxidation of powder samples at 483 K were also analyzed performing Rietveld refinements. The lattice parameters and relative ratios of the four pure phases were measured during the progression of the isothermal oxidation. The transformation of UO2 into U3O8 involves a complex modification of the oxygen sublattice and the onset of complex superstructures for U4O9 and U3O7, associated with regular stacks of complex defects known as cuboctahedra which consist of 13 oxygen interstitial atoms. The structural modifications during the oxidation process are discussed.

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