Study of Mechanical and Elastic Properties of Diamond Films by Surface Acoustic Wave Spectroscopy (SAWS)
Keyword(s):
Uv Laser
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ABSTRACTThe density and elastic properties of a 1.9 μm thick polycrystalline diamond film deposited on a silicon substrate were measured by surface acoustic wave (SAW) spectroscopy. A density of 3.45±0.05 g/cm3, Young's modulus of 940 ± 20 GPa and Poisson's ratio below 0.12 were determined from the dispersion of a broadband coherent surface acoustic wave pulse propagating in the layered system. The surface wave pulses were generated using a ns UV laser pulse and detected with a piezoelectric foil transducer.
Keyword(s):
2004 ◽
Vol 51
(3)
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pp. 368-371
2004 ◽
Vol 43
(No. 6A)
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pp. L706-L708
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2006 ◽
Vol 15
(2-3)
◽
pp. 193-198
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2004 ◽
Vol 51
(3)
◽
pp. 368-371
◽
2021 ◽
Vol 2131
(5)
◽
pp. 052098