Measuring the Adhesion of Diamond Thin Films to Substrates Using the Blister Test
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ABSTRACTIt is shown that the blister testing technique can be used to measure the adhesion of thin films to their substrates. A brief discussion of blister test mechanics is presented here, leading to a simple equation relating adhesion to the height of the blister and the pressure causing it to grow. Blister test data for plasma-enhanced CVD diamond films on Si substrates have been analyzed using this relation. The tests show adhesion energies of 1.8– 2.6 J/m2.
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1999 ◽
Vol 50
(6)
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pp. 486-493
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2008 ◽
Vol 15
(4)
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pp. 474-479
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1991 ◽
Vol 42
(12)
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pp. 1235-1239
1997 ◽
Vol 172
(3-4)
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pp. 404-415
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