scholarly journals Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties

1995 ◽  
Vol 388 ◽  
Author(s):  
A. A. Puretzky ◽  
D. B. Geohegan ◽  
G. E. Jellison ◽  
M. M. Mcgibbon
Keyword(s):  
Film Growth ◽  
Carbon Film ◽  
Laser Deposition ◽  
Ion Current ◽  
Diamond Like Carbon ◽  
Krf Laser ◽  
Arf Excimer Laser ◽  
Arf Laser ◽  
Carbon Plasma ◽  
Deposited Films

AbstractA comparative study of arF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality arF- and KrF-laser deposited films (up to 84% of sp3 bonded carbon in 7 J/cm2 -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by arF- and KrF- lasers. KrF-laser (6.7 J/cm2) irradiation produces a less energetic carbon plasma containing larger amounts of C2 and probably larger clusters compared with arF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized arF-laser carbon plasma results in the better diamond-like properties.

Deposition of Diamond-Like Carbon Films by Excimer Lasers Using Frozen Source Gases

1995 ◽  
Vol 397 ◽  
Author(s):  
Mitsugu Hanabusa ◽  
Kiyohito Tsujihara ◽  
Liu Zhengxin ◽  
Seiji Ishihara ◽  
Hironaga Uchida
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Degree Of Dissociation ◽  
Arf Laser ◽  
Frozen Gases ◽  
Quartz Substrates ◽  
High Degree ◽  
Power Densities ◽  
Deposited Films ◽  
Number Of Particles

ABSTRACTWe deposited diamond-like carbon (DLC) films, using frozen acetylene and acetone as the target of laser ablation. The frozen gases were dissociated by an ArF laser and a KrF laser. The DLC films were deposited on quartz substrates below 300°C. We measured the Raman spectra to identify the deposited films as DLC. The films showed the broad Raman peak at 1540 cm-1. The number of particles mixed into the deposits was controlled by laser power densities. By using the ArF laser for frozen acetylene we could reduce the hydrogen concentration in the films, which showed a high degree of dissociation of the source gas. The oxygen content was kept at the same level in the films deposited from frozen acetone as from frozen acetylene. The present results suggested the importance of energetic and charged species ejected from the frozen gas target.

Modeling of Film Growth in Pulsed Laser Deposition

1995 ◽  
Vol 397 ◽  
Author(s):  
M. Tyunin
Keyword(s):  
Growth Rate ◽  
Pulsed Laser Deposition ◽  
Laser Fluence ◽  
Film Growth ◽  
Surface Film ◽  
Substrate Surface ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Ambient Gas ◽  
Deposited Films

ABSTRACTFilm growth in pulsed laser deposition (PLD) is described as a process of sorption of ablated species on the substrate surface. Film growth rate and composition are qualitatively analyzed as a function of laser fluence and ambient gas pressure. As an example, analysis of the film composition is carried out for BiSrCaCuO and PbZrTiO pulsed laser deposited films.

Characteristics of Laser-Ablated Plasma and Properties Of Diamond-Like Carbon Film In Pulsed Laser Deposition

2000 ◽  
Vol 648 ◽  
Author(s):  
Yukihiko Yamagata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Raj K. Thareja ◽  
Kenji Ebihara ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Laser Energy ◽  
Carbon Film ◽  
Pulsed Laser ◽  
Optical Emission ◽  
Ccd Camera ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Swan Band

AbstractCharacteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Φg – a3Φu) and C3 (Comet Head System, A1Φu –X1Σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

Nano scale investigation of particulate contribution to diamond like carbon film by pulsed laser deposition

RSC Advances ◽  
2016 ◽  
Vol 6 (8) ◽  
pp. 6016-6028 ◽  
Author(s):  
Madhusmita Panda ◽  
G. Mangamma ◽  
R. Krishnan ◽  
Kishore K. Madapu ◽  
D. Nanda Gopala Krishna ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Carbon Film ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Raman Mapping ◽  
Relative Stiffness ◽  
Nano Scale ◽  
Diamond Like Carbon Film

Raman mapping and AFAM are useful tools to evaluate the relative stiffness of DLC films embedded with micro graphitic particulates.

OPTICAL PROPERTIES OF THE RAPID ANNEALED OXYGEN-DOPED DIAMOND-LIKE CARBON FILM

2019 ◽  
Vol 26 (01) ◽  
pp. 1850129 ◽  
Author(s):  
YI-MIN LU ◽  
GUO-JUN HUANG ◽  
YAN-LONG GUO ◽  
SHU-YUN WANG
Keyword(s):  
Infrared Spectra ◽  
Carbon Film ◽  
Carbon Films ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Infrared Band ◽  
Rapid Annealing ◽  
Diamond Like Carbon Film ◽  
Average Transmission ◽  
The Right

The amorphous oxygen-doped diamond-like carbon films were prepared by pulsed laser deposition. Compared with the pure diamond-like carbon film, there were much less graphite clusters on the surfaces of the oxygen-doped diamond-like carbon films, and the average transmission of the oxygen-doped diamond-like carbon films in the medium infrared band increased. However, some new absorption peaks in the infrared spectra of the oxygen-doped diamond-like carbon film were generated. Rapid annealing was experimented to remove the absorption peaks. XPS analysis showed that the fractions of the C–O and C=O bonds that generated the new absorption peaks were reduced more than the fractions of [Formula: see text] bonds by rapid annealing at 400[Formula: see text]C, and the absorption peaks in the medium infrared spectra decreased. It indicated that rapid annealing at right temperature during the right time could reduce greatly the absorption in the medium infrared band of oxygen-doped diamond-like carbon films.

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