Deposition of Diamond-Like Carbon Films by Excimer Lasers Using Frozen Source Gases

1995 ◽  
Vol 397 ◽  
Author(s):  
Mitsugu Hanabusa ◽  
Kiyohito Tsujihara ◽  
Liu Zhengxin ◽  
Seiji Ishihara ◽  
Hironaga Uchida
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Degree Of Dissociation ◽  
Arf Laser ◽  
Frozen Gases ◽  
Quartz Substrates ◽  
High Degree ◽  
Power Densities ◽  
Deposited Films ◽  
Number Of Particles

ABSTRACTWe deposited diamond-like carbon (DLC) films, using frozen acetylene and acetone as the target of laser ablation. The frozen gases were dissociated by an ArF laser and a KrF laser. The DLC films were deposited on quartz substrates below 300°C. We measured the Raman spectra to identify the deposited films as DLC. The films showed the broad Raman peak at 1540 cm-1. The number of particles mixed into the deposits was controlled by laser power densities. By using the ArF laser for frozen acetylene we could reduce the hydrogen concentration in the films, which showed a high degree of dissociation of the source gas. The oxygen content was kept at the same level in the films deposited from frozen acetone as from frozen acetylene. The present results suggested the importance of energetic and charged species ejected from the frozen gas target.

OPTICAL AND STRUCTURAL PROPERTIES OF NITROGENATED DIAMOND-LIKE CARBON FILMS PREPARED BY r.f. PECVD

2006 ◽  
Vol 13 (01) ◽  
pp. 1-6 ◽  
Author(s):  
M. RUSOP ◽  
S. ABDULLAH ◽  
J. PODDER ◽  
T. SOGA ◽  
T. JIMBO
Keyword(s):  
Photoelectron Spectroscopy ◽  
Uv Spectroscopy ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Considerable Effect ◽  
Wave Number ◽  
Diamond Like Carbon ◽  
P Type ◽  
Deposited Films

Nitrogenated diamond-like carbon films have been deposited on glass and p-type Si (100) substrates by radio frequency (r.f.) plasma-enhanced chemical vapor deposition (PECVD) with a frequency of 13.56 MHz at room temperature using CH 4 as precursor of carbon source and H 2 as a carrier gas. The deposition was performed at a different flow rate of nitrogen from 0 to 12 sccm under a constant r.f. power. The effect of nitrogen incorporation on the bonding states and growth kinetics of the deposited films have been investigated by Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, X-ray photoelectron spectroscopy and optical properties by UV spectroscopy measurement. Our experimental results show that the incorporation of nitrogen has a considerable effect on the properties of the deposited films. FTIR spectra show that the nitrogen is bonded to carbon and hydrogen as C=N , C≡N , N–H and C–H bonding configurations in the as-deposited film. The incorporation of nitrogen is found to shift the Raman G peak toward the higher wave number and to increase the Raman I D /I G ratio demonstrating the graphitic character of the hydrogenated amorphous carbon–nitrogen films. Band gap is found to reduce with the increase in nitrogen concentration.

Pretreatment Study on the Deposition of Diamond-Like Carbon Films on Quartz by Star-Shape MPCVD Reactor

2014 ◽  
Vol 912-914 ◽  
pp. 288-292
Author(s):  
Li Wei Xiong ◽  
Guo Hua Gong ◽  
Jian Hua Wang ◽  
Xiao Hui Cui ◽  
Wei Zou
Keyword(s):  
Microwave Plasma ◽  
Chemical Vapor ◽  
Diamond Powder ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Pretreatment Time ◽  
Infrared Spectrometer ◽  
Optical Applications ◽  
The Fourier Transform ◽  
Quartz Substrates

Diamond-Like Carbon (DLC) films were deposited on quartz substrates by using a gas mixture of hydrogen-methane-oxygen in the Star-Shape Microwave Plasma enhanced Chemical Vapor Deposition (MPCVD) reactor. The pretreatment parameters include the pretreatment methods and the pretreatment time was optimized. Results showed that ultrasonically abrasive in the acetone solution with nanocrystalline diamond powder in it was an efficient pretreatment method to advance the deposition of DLC films, and 10 minute turned to be the most appropriate time for this pretreatment. The Fourier Transform Infrared spectrometer (FTIR) showed that the DLC films synthesized by the optimized technics have high transparence fit for optical applications. These indicated that the Star-Shape MPCVD reactor was the perfect equipment for the volume-produce of DLC films for its unique big reactive cavity.

scholarly journals Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties

1995 ◽  
Vol 388 ◽  
Author(s):  
A. A. Puretzky ◽  
D. B. Geohegan ◽  
G. E. Jellison ◽  
M. M. Mcgibbon
Keyword(s):  
Film Growth ◽  
Carbon Film ◽  
Laser Deposition ◽  
Ion Current ◽  
Diamond Like Carbon ◽  
Krf Laser ◽  
Arf Excimer Laser ◽  
Arf Laser ◽  
Carbon Plasma ◽  
Deposited Films

AbstractA comparative study of arF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality arF- and KrF-laser deposited films (up to 84% of sp3 bonded carbon in 7 J/cm2 -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by arF- and KrF- lasers. KrF-laser (6.7 J/cm2) irradiation produces a less energetic carbon plasma containing larger amounts of C2 and probably larger clusters compared with arF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized arF-laser carbon plasma results in the better diamond-like properties.

The Effects of Nitrogen and Annealing on the Electrical Property of the Diamond-Like Carbon (DLC) Films

2006 ◽  
Vol 317-318 ◽  
pp. 589-592
Author(s):  
Bong Geun Choi ◽  
Jae Kwang Kim ◽  
Won Jae Yang ◽  
Koichi Niihara ◽  
Jong Won Yoon ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Electrical Property ◽  
Flow Rate ◽  
Annealing Temperature ◽  
Carbon Films ◽  
Structure Change ◽  
Diamond Like Carbon ◽  
Bonding Structure ◽  
Deposited Films ◽  
Si Wafer

The nitrogenated diamond-like carbon films (a-C:H:N) were deposited on Si-wafer by the rf-PECVD method with the addition of nitrogen to the mixture gas of methane and hydrogen. We were investigating the effect of the additive nitrogen gases and annealing in relationship between bonding structure and electrical properties of the deposited films. The electrical conductivity of films increased with the flow rate of nitrogen increasing up to 10 sccm. Also as annealing temperature was increased, the electrical conductivity of films increased. The structure analysis results show that an increase of the flow rate of nitrogen and annealing temperature favor the formation of sp2 bonding in the films. Therefore, we confirmed that the increase of the electrical conductivity is due to structure change by graphitization of the films.

Surface Phenomena of the Thin Diamond-Like Carbon Films

1998 ◽  
Vol 555 ◽  
Author(s):  
V. I. Polyakov ◽  
A. I. Rukovishnikov ◽  
A. V. Khomich ◽  
B. L. Druz ◽  
D. Kania ◽  
...  
Keyword(s):  
Deep Level ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Surface Phenomena ◽  
Capacitance Voltage ◽  
Planar Array ◽  
Strong Surface ◽  
Transient Spectroscopy ◽  
Quartz Substrates ◽  
Dlts Spectra

AbstractDiamond-like carbon films (DLC) 10–40 nm thick were deposited on quartz substrates on an interdigitated planar array of 20 μm Ni electrodes already prepared by lithographic techniques. The influence of the adsorbed molecules onte electrical properties of the thin DLC films was investigated. Current and capacitance-voltage characteristics were examined. Charge-based deep level transient spectroscopy (Q-DLTS) was used for study of adsorption and desorption processes. The strong sensitivity of Q-DLTS spectra to the presence of the vapor water and isopropyl alcohol was found. For example, the Q-DLTS signal for some deposited DLC film was changed more then in order in presence of the water vapor. Such strong surface phenomena of the thin DLC films may be exploited in novel gas sensor devices.

Surface Morphologies of Pulsed Laser Deposited Ultra-Thin Diamond-like Carbon Films

1997 ◽  
Vol 11 (11) ◽  
pp. 471-476 ◽  
Author(s):  
Ning Chi ◽  
Hou Qingrun ◽  
J. Gao ◽  
K. Y. Chan ◽  
D. L. Phillips
Keyword(s):  
Porous Silicon ◽  
Deposition Temperature ◽  
Carbon Coating ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Force Microscopy ◽  
Atomic Force ◽  
Surface Morphologies ◽  
Deposited Films

The surface morphologies of pulsed laser deposited ultra-thin diamond-like carbon films were studied by optical microscopy and atomic force microscopy. Off-axis deposited films had a larger size of particulates than on-axis deposited films. The root-mean-squared surface roughness was sensitive to deposition temperature. As a protective coating, the film was deposited on porous silicon. The surface morphology of the porous silicon changed considerably after carbon coating.

scholarly journals Dry And Ringer Solution Lubricated Tribology Of Thin Osseoconductive Metal Oxides And Diamond-Like Carbon Films

2015 ◽  
Vol 60 (3) ◽  
pp. 2139-2144 ◽  
Author(s):  
W. Waldhauser ◽  
J. M. Lackner ◽  
M. Kot ◽  
B. Major
Keyword(s):  
Ringer Solution ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Tribological Behaviour ◽  
Micro Particles ◽  
Adhesion Failure ◽  
Strong Adhesion ◽  
Substrate Surfaces ◽  
Titanium Silicon ◽  
Deposited Films

AbstractAchieving fast and strong adhesion to jawbone is essential for dental implants. Thin deposited films may improve osseointegration, but they are prone to cohesive and adhesive fracture due to high stresses while screwing the implant into the bone, leading to bared, less osteoconductive substrate surfaces and nano- and micro-particles in the bone. Aim of this work is the investigation of the cohesion and adhesion failure stresses of osteoconductive tantalum, titanium, silicon, zirconium and aluminium oxide and diamond-like carbon films. The tribological behaviour under dry and lubricated conditions (Ringer solution) reveals best results for diamond-like carbon, while cohesion and adhesion of zirconium oxide films is highest.

Chemical structure of diamond-like carbon thin films

1990 ◽  
Vol 48 (4) ◽  
pp. 710-711
Author(s):  
N.-H. Cho ◽  
K.M. Krishnan ◽  
D.B. Bogy
Keyword(s):  
Electrical Resistivity ◽  
Chemical Structure ◽  
Diamond Like Carbon ◽  
Chemical Structures ◽  
Sputtering Power ◽  
Data Aquisition ◽  
Equilibrium Phases ◽  
Electron Energy Loss ◽  
Power Densities ◽  
Preparation Techniques

Diamond-like carbon (DLC) films have attracted much attention due to their useful properties and applications. These properties are quite variable depending on film preparation techniques and conditions, DLC is a metastable state formed from highly non-equilibrium phases during the condensation of ionized particles. The nature of the films is therefore strongly dependent on their particular chemical structures. In this study, electron energy loss spectroscopy (EELS) was used to investigate how the chemical bonding configurations of DLC films vary as a function of sputtering power densities. The electrical resistivity of the films was determined, and related to their chemical structure.DLC films with a thickness of about 300Å were prepared at 0.1, 1.1, 2.1, and 10.0 watts/cm2, respectively, on NaCl substrates by d.c. magnetron sputtering. EEL spectra were obtained from diamond, graphite, and the films using a JEOL 200 CX electron microscope operating at 200 kV. A Gatan parallel EEL spectrometer and a Kevex data aquisition system were used to analyze the energy distribution of transmitted electrons. The electrical resistivity of the films was measured by the four point probe method.

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