Tin-Doping Induced Defects in GaAs Films Grown by Molecular Beam Epitaxy
Keyword(s):
AbstractHeavily Sn-doped GaAs films have been grown by molecular-beam epitaxy and found to contain single-crystal Sn particles situated in the near-surface region of the epilayer GaAs. The morphology and chemical composition of the particles have been examined by using cross-section transmission electron microscopy combined with energy-dispersive x-ray spectroscopy. Different growth conditions were used to study the Sn-particle formation and high-resolution transmission electron microscopy was used to investigate microstructures. The observations are discussed in terms of several models previously proposed for these phenomena.
1999 ◽
Vol 14
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pp. 3226-3236
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2016 ◽
Vol 30
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pp. 1650269
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1999 ◽
Vol 38
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pp. 4673-4675
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1995 ◽
Vol 150
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pp. 388-393
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