Transient Photocurrent Spectroscopy of Trap Levels in Ultra-Thin SiO2 Films
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AbstractStress-induced trap levels near Si/SiO2 interfaces for MOS diodes with 10 imi-thick oxides are investigated by measuring the transient photocurrent, which depends on the incident photon energy. The electron trap levels are filled by tunneling injection, and the electrons are depopulated by monochromatic light irradiation. The transient photocurrent, which is measured as an external circuit current, decays exponentially with time. Based on a proposed detrapping model, the optical cross section is estimated to be about 1×10−17 cm2 for hv=2−3 eV. The obtained photo-accessible trap density has a broad distribution at around hv=2.5 eV.
1998 ◽
Vol 37
(Part 1, No. 3B)
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pp. 1274-1277
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2021 ◽
1969 ◽
Vol 24
(6)
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pp. 722-728
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