The Fabrication of Semiconductor Nanostructure Arrays on a Silicon Substrate Using an Anodized Aluminum Template

1996 ◽  
Vol 452 ◽  
Author(s):  
S. P. McGinnis ◽  
J. N. Cleary ◽  
B. Das

AbstractWe have developed a nanogrowth technology for the fabrication of periodic arrays of semiconductor nanostructures on silicon that is currently being investigated for silicon based x-ray detectors. The semiconductor nanostructures are formed by chemical synthesis in pores of a template created by the anodization of aluminum on a silicon substrate. The use of the silicon substrate allows greater control over the aluminum thin film properties, better in situ monitoring of the pore formation process, and the direct integration of nanostructure arrays with conventional silicon technology.

1992 ◽  
Vol 285 ◽  
Author(s):  
C. H. Chen ◽  
R. C. Phillips ◽  
P. W. Morrison

ABSTRACTKinetics of photodeposition of superconducting films was studied by using real time in-situ monitoring of gas phase species with mass spectrometry and thin-film properties by Fourier Transform Infrared (FTIR) spectrometry. A mass spectrometer was used to study wavelength and power dependent desorbed atoms and molecules during laser ablation process. FTIR was used to monitor the surface properties of thin film. Real time surface temperatures can be easily obtained by FTIR. By combinging mass spectrometry and FTIR, an optimum condition of making high-quality superconducting film can possibly be found.


2021 ◽  
Vol 326 ◽  
pp. 129007
Author(s):  
Zahra Nasri ◽  
Giuliana Bruno ◽  
Sander Bekeschus ◽  
Klaus-Dieter Weltmann ◽  
Thomas von Woedtke ◽  
...  

2021 ◽  
pp. 2105799
Author(s):  
Yu Zhang ◽  
Li Yang ◽  
Jintao Wang ◽  
Wangying Xu ◽  
Qiming Zeng ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document