Research progress of silicon nanostructures prepared by electrochemical etching based on galvanic cells

Metal-assisted etching of silicon in HF aqueous solution has attracted widespread attention due to its potential applications in electronics, photonics, renewable energy, and biotechnology. In this paper, the basic process and mechanism of metal assisted electrochemical etching of silicon in vapor or liquid atmosphere based on galvanic cells are reviewed. This paper focuses on the use of gas-phase oxidants O2 and H2O2 instead of liquid phase oxidants Fe(NO3)3 and H2O2 to catalyze the etching of silicon in the vapor atmosphere of HF aqueous solution. The mechanism of substrate enhanced metal-assisted chemical etching for the preparation of large-area silicon micro nanostructure arrays is summarized, and the impact of substrate type and surface area on reactive etching is discussed.

Physics-augmented deep learning for high-speed electromagnetic simulation and optimization

The calculation of electromagnetic field distributions within structured media is central to the optimization and validation of photonic devices. We introduce WaveY-Net, a hybrid data- and physics-augmented convolutional neural network that can predict electromagnetic field distributions with ultra fast speeds and high accuracy for entire classes of dielectric photonic structures. This accuracy is achieved by training the neural network to learn only the magnetic near-field distributions of a system and to use a discrete formalism of Maxwell's equations in two ways: as physical constraints in the loss function and as a means to calculate the electric fields from the magnetic fields. As a model system, we construct a surrogate simulator for periodic silicon nanostructure arrays and show that the high speed simulator can be directly and effectively used in the local and global freeform optimization of metagratings. We anticipate that physics-augmented networks will serve as a viable Maxwell simulator replacement for many classes of photonic systems, transforming the way they are designed.

Light Management With Grating Structures in Optoelectronic Devices

Ordered and patterned micro/nanostructure arrays have emerged as powerful platforms for optoelectronic devices due to their unique ordered-dependent optical properties. Among various structures, grating structure is widely applied because of its simple fabrication process, easy adjusting of size and morph, and efficient light trapping. Herein, we summarized recent developments of light management with grating structures in optoelectronic devices. Typical mechanisms about the grating structures in optoelectronic devices have been reviewed. Moreover, the applications of grating structures in various optoelectronic devices have been presented. Meanwhile, the remaining bottlenecks and perspectives for future development have been discussed.

Microfluidics-Based Plasmonic Biosensing System Based on Patterned Plasmonic Nanostructure Arrays

This review aims to summarize the recent advances and progress of plasmonic biosensors based on patterned plasmonic nanostructure arrays that are integrated with microfluidic chips for various biomedical detection applications. The plasmonic biosensors have made rapid progress in miniaturization sensors with greatly enhanced performance through the continuous advances in plasmon resonance techniques such as surface plasmon resonance (SPR) and localized SPR (LSPR)-based refractive index sensing, SPR imaging (SPRi), and surface-enhanced Raman scattering (SERS). Meanwhile, microfluidic integration promotes multiplexing opportunities for the plasmonic biosensors in the simultaneous detection of multiple analytes. Particularly, different types of microfluidic-integrated plasmonic biosensor systems based on versatile patterned plasmonic nanostructured arrays were reviewed comprehensively, including their methods and relevant typical works. The microfluidics-based plasmonic biosensors provide a high-throughput platform for the biochemical molecular analysis with the advantages such as ultra-high sensitivity, label-free, and real time performance; thus, they continue to benefit the existing and emerging applications of biomedical studies, chemical analyses, and point-of-care diagnostics.

Lattice-Match Stabilization and Magnetic Properties of Metastable Epitaxial Permalloy-Disilicide Nanostructures on a Vicinal Si(111) Substrate

We report the epitaxial formation of metastable γ-(FexNi1−x)Si2 nanostructure arrays resulting from the reaction of Ni80Fe20 permalloy with vicinal Si(111) surface atoms. We then explore the effect of structure and composition on the nanostructure’s magnetic properties. The low-temperature annealing (T < 600 °C) of a pre-deposited permalloy film led to solid-phase epitaxial nucleation of compact disk-shaped island nanostructures decorating <110> ledges of the stepped surface, with either (2 × 2) or (3×3) R30° reconstructed flat top faces. High resolution scanning transmission electron microscopy analysis demonstrated fully coherent epitaxy of the islands with respect to the substrate, consistent with a well-matched CaF2-prototype structure associated with γ-FeSi2, along perfect atomically sharp interfaces. Energy dispersive spectroscopy detected ternary composition of the islands, with Fe and Ni atoms confined to the islands, and no trace of segregation. Our magnetometry measurements revealed the superparamagnetic behavior of the silicide islands, with a blocking temperature around 30 K, reflecting the size, shape, and dilute arrangement of the islands in the assembly.

Well-defined nanostructuring with programmable anodic aluminium oxide template

Well-defined nanostructuring over size, shape, spatial configuration, and multi-combination is a feasible concept to reach unique properties of nanostructure arrays, while satisfying such broad and stringent requirements with conventional techniques is challenging. Here, we report programmable anodic aluminium oxide templates to address this challenge by achieving well-defined pore features within templates in terms of in-plane and out-of-plane shape, size, spatial configuration, and pore combination. The structural programmability of template pores arises from broad-range anodization voltage adjusting together with uneven aluminium anodization rate designing, and further relies on a systematic blueprint guiding pore diversification. Starting from the programmable templates, we realize a series of nanostructures that inherit equal structural controllability relative to their template counterparts. Proof-of-concept applications based on such nanostructures demonstrate boosted performance. In light of the broad selectivity and high controllability, programmable templates will provide an all-in-one platform for well-defined nanostructuring.