Structural Characterization of Crystalline Si-C-N Films

1997 ◽  
Vol 498 ◽  
Author(s):  
E. G. Wang ◽  
Cheng-Zhang Wang ◽  
Changfeng Chen ◽  
Yan Chen
Keyword(s):  
Electron Microscopy ◽  
Structural Characterization ◽  
Chemical Vapor ◽  
First Principles Calculations ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Hot Filament ◽  
Microscopy Images ◽  
Insight Into

ABSTRACTHigh quality crystalline Si-C-N films on silicon substrate have been synthesized by bias-assisted hot filament chemical vapor deposition (CVD) using a gas mixture of nitrogen and methane. Scanning electron microscopy images show that the Si-C-N clusters are composed of many columnar crystals with hexagonal facets. X-ray diffraction and transmission electron microscopy analyses confirm the formation of Si-C-N crystals with lattice parameters a=7.06Å and c=2.72Å. First principles calculations are performed for β-Si3–nCnN4 (n=0,1,2,3). The calculated results support the experimental structural characterization and provide further insight into the property of the system. With increasing amount of C substitution, the bulk modulus progressively increases to 4.44 Mbar, comparable to that of diamond (4.43 Mbar), and both a and c are reduced but the ratio c/a shows little variation.

SYNTHESIS OF HIGH QUALITY CRYSTALLINE C-N FILMS ON SILICON

1996 ◽  
Vol 10 (12) ◽  
pp. 567-571 ◽  
Author(s):  
YAN CHEN ◽  
E.G. WANG ◽  
FENG CHEN ◽  
LIPING GUO
Keyword(s):  
Electron Microscopy ◽  
Vapor Deposition ◽  
Interfacial Layer ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
High Quality ◽  
X Ray ◽  
Transmission Electron ◽  
Hot Filament ◽  
Microscopy Images

High quality crystalline C–N films have been synthesized via hot filament chemical vapor deposition using a gas mixture of nitrogen and methane. Scanning electron microscopy images show that a high density of crystalline clusters has been achieved. The clusters are composed of small columnar crystals (20–200 nm across) with hexagonal facets. Energy dispersive X ray analysis indicates a relative nitrogen:carbon composition of 1.30–2.5. X ray diffraction results indicate the films composed of β- and α- C 3 N 4 phases. Together with transmission electron microscopy analyses, we suggest that an interfacial layer C 3−x Si x N 4 is formed between the silicon substrate and the crystalline carbonnitride films.

Synthesis of Crystalline C3N4 films and the new C-N Phases

1996 ◽  
Vol 441 ◽  
Author(s):  
Yan Chen ◽  
D. J. Johnson ◽  
R. H. Prince ◽  
Liping Guo ◽  
E. G. Wang
Keyword(s):  
Electron Microscopy ◽  
Vapor Deposition ◽  
Growth Parameters ◽  
Chemical Vapor ◽  
Monoclinic Structure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Lattice Constants ◽  
Transmission Electron ◽  
Hot Filament

AbstractCrystalline C-N films composed of α- and β-C3N4, as well as other C-N phases, have been synthesized via bias-assisted hot-filament chemical vapor deposition using a gas mixture of nitrogen and methane. Scanning electron microscopy(SEM), energy dispersive X-ray (EDX) analysis, X-ray diffraction (XRD) and transmission electron microscopy (TEM) were used to characterize the films. Lattice constants of the α- and β-C3N4 phases obtained coincide very well with the theoretical values. In addition to these phases, two new C-N phases in the films have been identified by TEM and XRD; one having a tetragonal structure with a = 5.65 Å, c = 2.75Å, and the second having a monoclinic structure with a = 5.065 Å, b= 11.5 Å, c = 2.801 Å and β = 96°. Their stoichiometric values and atomic arrangements have not yet been identified. Furthermore, variation in growth parameters, for example methane concentration, bias voltage, etc., can yield preferred growth of different C-N phases.

scholarly journals Study of the Thermal Annealing on Structural and Morphological Properties of High-Porosity A-WO3 Films Synthesized by HFCVD

Nanomaterials ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 1298 ◽  
Author(s):  
M. Cruz-Leal ◽  
O. Goiz ◽  
F. Chávez ◽  
G. F. Pérez-Sánchez ◽  
N. Hernández-Como ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thermal Annealing ◽  
Chemical Vapor ◽  
Morphological Properties ◽  
High Porosity ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Vis Spectroscopy ◽  
Vapor Deposition Technique ◽  
Hot Filament

High-porosity nanostructured amorphous tungsten OXIDE (a-WO3) films were synthesized by a Hot Filament Chemical Vapor Deposition technique (HFCVD) and then transformed into a crystalline WO3 by simple thermal annealing. The a-WO3 films were annealed at 100, 300, and 500 °C for 10 min in an air environment. The films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman spectroscopy, high-resolution transmission electron microscopy (HR-TEM), and UV–vis spectroscopy. Results revealed that the a-WO3 films were highly porous, composed of cauliflower-like structures made of nanoparticles with average sizes of 12 nm. It was shown that the effect of annealing on the morphology of the a-WO3 films leads to a sintering process. However, the morphology is conserved. It was found that at annealing temperatures of 100 °C, the a-WO3 films are of an amorphous nature, while at 300 °C, the films crystallize in the monoclinic phase of WO3. The calculated bandgap for the a-WO3 was 3.09 eV, and 2.53 eV for the film annealed at 500 °C. Finally, the results show that porous WO3 films preserve the morphology and maintain the porosity, even after the annealing at 500 °C.

Growth and Characterization of Tungsten Oxide for Applications in Nanoelectronics

2006 ◽  
Vol 48 ◽  
pp. 113-118
Author(s):  
Karthikk Sridharan ◽  
Kenneth P. Roberts ◽  
Saibal Mitra
Keyword(s):  
Tungsten Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Tungsten Filament ◽  
X Ray ◽  
Transmission Electron ◽  
Oxide Nanorods ◽  
Hot Filament

Tungsten oxide nanorods were prepared in a hot filament chemical vapor deposition (HFCVD) reactor. A mixture of gases containing hydrogen, oxygen or hydrogen and methane mixed with water vapor were passed into a quartz glass jar reactor and activated using a heated tungsten filament. The resulting deposits were characterized by transmission electron microscopy (TEM), x-ray diffraction (XRD), and Raman Spectroscopy. The deposit consisted of tungsten oxide nanorods (5 – 10 nm diameter and 50 – 75 nm long) and tungsten nanospheres with diameters of ~50nm. The tungsten oxide is then reduced to metallic tungsten by annealing in a hydrogen environment.

Low Temperature Large Scale CVD Synthesis of Nano Onion-Like Fullerenes

2012 ◽  
Vol 490-495 ◽  
pp. 3211-3214 ◽  
Author(s):  
Lei Shan Chen ◽  
Cun Jing Wang
Keyword(s):  
Electron Microscopy ◽  
Low Temperature ◽  
Aluminum Hydroxide ◽  
Large Scale ◽  
Iron Catalyst ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Naoh Solution ◽  
Synthesis Reactions

Synthesis reactions were carried out by chemical vapor deposition using iron catalyst supported on aluminum hydroxide at 400 °C and 420 °C, in the presence of argon as carrier gas and acetylene as carbon source. The aluminum hydroxide support was separated by refluxing the samples in 40% NaOH solution for 2 h and 36% HCl solution for 24 h, respectively. The samples were characterized by field-emission scanning electron microscopy, energy dispersive spectroscopy, high-resolution transmission electron microscopy and X-ray diffraction. The results show that carbon nanotubes were the main products at 420 °C, while large scale high purity nano onion-like fullerenes encapsulating Fe3C, with almost uniform sizes ranging from 10-50 nm, were obtained at the low temperature of 400 °C.

Detonation Synthesis of Nano-Size Materials

1995 ◽  
Vol 418 ◽  
Author(s):  
J. Forbes ◽  
J. Davis ◽  
C. Wong
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Nucleation And Growth ◽  
Detonation Synthesis ◽  
X Ray Diffraction ◽  
Crystalline Materials ◽  
X Ray ◽  
Transmission Electron ◽  
Nano Size

AbstractThe detonation of explosives typically creates 100's of kbar pressures and 1000's K temperatures. These pressures and temperatures last for only a fraction of a microsecond as the products expand. Nucleation and growth of crystalline materials can occur under these conditions. Recovery of these materials is difficult but can occur in some circumstances. This paper describes the detonation synthesis facility, recovery of nano-size diamond, and plans to synthesize other nano-size materials by modifying the chemical composition of explosive compounds. The characterization of nano-size diamonds by transmission electron microscopy and electron diffraction, X-ray diffraction and Raman spectroscopy will also be reported.

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