A Comparative Study of Residual Stresses in Single and Multilayer Composite Diamond Coatings

1997 ◽  
Vol 505 ◽  
Author(s):  
K. Jagannadham ◽  
T. R. Watkins
Keyword(s):  
Residual Stresses ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Diamond Coatings ◽  
Ray Method ◽  
X Ray ◽  
Molybdenum Substrate ◽  
Composite Diamond ◽  
Hot Filament ◽  
Mechanisms Of Adhesion

ABSTRACTResidual stresses in four types of diamond films deposited by hot filament chemical vapor deposition on molybdenum substrate, three types on tungsten carbide or silicon nitride substrate are measured. Residual stresses are determined by X-ray method and Raman spectroscopy. The results from both these techniques are compared and conclusions are made on the mechanisms of adhesion of diamond films to the different substrates.

Residual Stresses in Single and Multilayer Composite Diamond Coatings

1996 ◽  
Vol 458 ◽  
Author(s):  
K. Jagannadham ◽  
T. R. Watkims ◽  
J. Narayan
Keyword(s):  
Residual Stresses ◽  
Single Layer ◽  
Chemical Vapor ◽  
Diamond Coating ◽  
Diamond Coatings ◽  
X Ray Diffraction ◽  
X Ray ◽  
Different Types ◽  
Composite Diamond ◽  
Hot Filament

ABSTRACTResidual stresses were measured in different types of diamond coatings deposited onto molybdenum substrates by hot filament chemical vapor deposition. The types of coatings examined include a continuous single layer diamond coating and a continuous multilayer diamond composite coating with an aluminum nitride embedding layer. The stresses were determined by X-ray diffraction and Raman spectroscopy and compared.

Residual stresses in chemical vapor deposition free-standing diamond films by X-ray diffraction analyses

2000 ◽  
Vol 288 (2) ◽  
pp. 217-222 ◽  
Author(s):  
O Durand ◽  
R Bisaro ◽  
C.J Brierley ◽  
P Galtier ◽  
G.R Kennedy ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Residual Stresses ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Free Standing ◽  
X Ray

Particle-Assisted Oriented Deposition of Diamond Thin Films

1996 ◽  
Vol 423 ◽  
Author(s):  
Dong-Gu Lee ◽  
Rajiv K. Singh
Keyword(s):  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
X Ray ◽  
Diamond Particles ◽  
Film Synthesis ◽  
Diamond Powders ◽  
Hot Filament

AbstractWe have developed a method for <111> oriented diamond film synthesis using micron-sized diamond particles. Different size of diamond powders were electrophoretically seeded on silicon substrates using diamond suspensions in organic solvents (acetone, methanol, and ethanol). Diamond suspension in acetone was found to be the best for obtaining uniform diamond seeding by electrophoresis. The thickness of diamond seeded films was changed by varying the applied voltage to observe the effect on the orientation of diamond particles. Then diamond films were deposited by the hot filament chemical vapor deposition (HFCVD) process. A preferred orientation with <111> direction normal to the substrate was obtained for monolayer coatings. The surface morphology, crystal orientation, and quality of diamond films were investigated using scanning electron microscopy, x-ray diffractometry, and Raman spectroscopy.

Silicon Nitride Tools Coated With Tic Or Tin Composite Diamond Structures

1995 ◽  
Vol 415 ◽  
Author(s):  
W.D. Fan ◽  
K. Jagannadham ◽  
J. Narayan
Keyword(s):  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Diamond Coating ◽  
Diamond Coatings ◽  
Adhesion Properties ◽  
Tin Films ◽  
Composite Diamond ◽  
Diamond Paste

ABSTRACTComposite diamond coatings on Si3N4 substrates have been developed to minimize stresses/strains and improve wear and adhesion properties. The coatings consist of a first layer of discontinuous diamond crystallites which are anchored to the Si3N4 substrate by a second interposing layer of TiC or TiN film. A top third layer of continuous diamond film is grown epitaxially on the first layer. The diamond films and TiC or TiN films were deposited using hot filament chemical vapor deposition and laser physical vapor deposition, respectively. The TiC and TiN films were examined by X-ray diffraction. The diamond films were characterized by scanning electron microscopy and Raman spectroscopy. Adhesion of the diamond coatings was investigated using overlap polishing with diamond paste, wear against Al-12.5%Si alloy, and pull-test. The results show that after introducing an interposing layer of TiC or TiN, adhesion of diamond coatings on Si3N4 substrates is improved significantly. After polishing test against diamond paste for 4 hours, only 30% of diamond was retained with single diamond coating while 80% of diamond was found with TiN composite diamond coating. The mechanism of improvement of adhesion is discussed.

Application of a Thermobalance for studying Deposition kinetics of Diamond Films

1989 ◽  
Vol 162 ◽  
Author(s):  
Jerry Czarnecki ◽  
David Thumim
Keyword(s):  
Diamond Films ◽  
Chemical Vapor ◽  
Carbon Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Deposition Kinetics ◽  
Oxidation Rates ◽  
Exponential Increase ◽  
Hot Filament ◽  
Kinetics Of

ABSTRACTWeight recording using a thermobalance type Cahn TG-171 has been applied to study Hot, Filament Enhanced Chemical Vapor Deposition (HFCVD) of carbon films from methane. Changes in the deposition rates during each individual process may indicate four stages of the deposition kinetics: 1- generation of nuclei (slow, linear); 2- growth on nuclei (exponential increase); 3- aggregation of crystals (slowing); 4- growth on the surface of diamond film, completely covering the substrate (linear). An attempt to determine the concentration of graphite in the deposited layer, based on differences in oxidation rates of diamond and graphite has been proposed, as supplementary to X-ray diffraction and Raman spectroscopy.

Fabrication and Applications of Ultra-Smooth Composite Diamond Coated WC-Co Drawing Dies

2011 ◽  
Vol 175 ◽  
pp. 233-238 ◽  
Author(s):  
Bin Shen ◽  
Fang Hong Sun ◽  
Zhi Ming Zhang ◽  
He Sheng Shen ◽  
Song Shou Guo
Keyword(s):  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Entry Zone ◽  
X Ray ◽  
Nano Crystalline ◽  
Composite Diamond ◽  
And Performance ◽  
Hot Filament ◽  
Drawing Dies

Micro/nano-crystalline multilayered ultra-smooth diamond (USCD) films are deposited on the interior-hole surface of conventional WC-Co drawing dies with a combined process consisting of the hot filament chemical vapor deposition (HFCVD) method and polishing technique. Scanning electron microscopy (SEM), surface profilemeter, Raman spectroscopy and X-ray diffraction (XRD) are employed to provide a characterization of as-deposited USCD films. The results exhibit that as-deposited USCD films present an ultra-smooth surface, its surface roughness values (Ra) in the entry zone, drawing zone and bearing zone are measured as 25.7 nm, 23.3 nm and 25.5 nm respectively. Furthermore, the working lifetime and performance of as-fabricated USCD coated drawing dies are examined in producing copper tubes with hollow sinking, fixed plug and floating plug. The results show that the lifetime of USCD coated drawing is as more than 30 times as that of WC-Co drawing dies in the drawing process with hollow sinking, 7 times in the fixed plug drawing and 10 times in the floating drawing.

Growth of Nanocrystalline Diamond Films on Co-Cemented Tungsten Carbide Substrates by Hot Filament CVD

2004 ◽  
Vol 471-472 ◽  
pp. 52-58 ◽  
Author(s):  
Fang Hong Sun ◽  
Zhi Ming Zhang ◽  
H.S. Shen ◽  
Ming Chen
Keyword(s):  
Electron Microscopy ◽  
Surface Roughness ◽  
Raman Spectroscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Composite Diamond ◽  
Hot Filament

Nanocrystalline diamond films were deposited on Co-cemented carbide substrates using CH4/H2/Ar gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The evidence of nanocrystallinity, smoothness and purity was obtained by characterizing the sample with scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy, atomic force microscopy (AFM), high-resolution transmission electron microscopy (HR-TEM) and selected-area electron diffraction (SAED). A new process was used to deposit composite diamond films by a two-step chemical vapor deposition procedure including first the deposition of the rough polycrystalline diamond and then the smooth fine-grained nanocrystalline diamond. The results show that the film consists of nanocrystalline diamond grains with sizes range from 20 to 80 nm. The Raman spectroscopy, XRD pattern, HR-TEM image and SAED pattern of the films indicate the presence of nanocrystalline diamond. Surface roughness is measured as Ra<100nm by AFM. Smooth nanocrystalline diamond layers can be deposited on conventional microcrystalline diamond layers using a two-step chemical vapor deposition by regulating the deposition parameters. These composite diamond films with the multiplayer (nanocrystalline/microcrystalline) structure have low surface roughness and high adhesive strength on WC-Co substrates. The diamond-coated tools and drawing dies with these composite coatings display excellent performances in the practical application.

Residual Stress Analysis of Microwave Plasma CVD Diamond Films

2005 ◽  
Vol 495-497 ◽  
pp. 1359-1364 ◽  
Author(s):  
Leng Chen ◽  
Wei Min Mao ◽  
Fan Xiu Lu ◽  
Ping Yang
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Thermal Stresses ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Orientation Distribution ◽  
X Ray ◽  
Plasma Chemical Vapor Deposition ◽  
Microwave Plasma Cvd

The residual stress and crystallographic texture of diamond films were investigated in the present work. The diamond films were synthesized on (100) silicon wafer by Microwave Plasma Chemical Vapor deposition (MPCVD). Then the residual stresses of the films were measured by X-ray diffractometer equipped with the two-dimensional detector. The residual stresses can be classified into two categories, i.e., the intrinsic stresses and the thermal stresses. It was shown that the thermal stresses were compressive in the temperature range studied and the intrinsic stresses were tensile. The crystallographic textures of the films were measured by X-ray diffractometer with the method of pole figure and orientation distribution function (ODF). The experimental results suggest that the crystallographic textures of the films depend upon the deposition temperature and methane flow rates, and the components and intensity of crystallographic textures have effect on the residual stresses in diamond films to a certain extent.

X-ray Characterization of Thin Diamond Films Deposited by Hot-Filament Chemical Vapor Deposition

1990 ◽  
Vol 34 ◽  
pp. 543-555
Author(s):  
Richard F. Hamilton ◽  
Diwakar Garg ◽  
Keith A. Wood ◽  
David S. Hoover
Keyword(s):  
Crystal Structure ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Free Standing ◽  
X Ray ◽  
Long Wavelength ◽  
Transmission Properties ◽  
Hot Filament

AbstractSynthesizing thin diamond films by chemical vapor deposition (CVD) is the most recent and technologically important development in the thin-film field. Thin diamond films are useful in many applications because of their unique physical, chemical, optical, and electronic properties.To assess thin diamond films’ suitability for support membranes in X-ray lithography, X-ray diffraction was used to characterize the crystal structure and orientation of these films deposited on silicon wafers by hot-filament assisted CVD. X-ray transmission properties of free-standing thin diamond films prepared by selectively etching silicon substrates were characterized by X-ray fluorescence in short and long wavelength regions.This paper discusses conventional and grazing incidence diffraction techniques used to study the crystal structure of thin diamond films and compares the results with film morphology. It also describes X-ray transmission properties of these films in terms of Beer's Law, the mass absorption coefficient, and the wavelength of attenuated radiation. Finally, it reveals the long wavelength regions for optimum X-ray lithography operations using polycrystalline diamond (PCD) film.

Diamond-ceramic composite tool coatings

1994 ◽  
Vol 9 (11) ◽  
pp. 2850-2867 ◽  
Author(s):  
W.D. Fan ◽  
X. Chen ◽  
K. Jagannadham ◽  
J. Narayan
Keyword(s):  
Wear Resistance ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Thermal Stresses ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Diamond Coatings ◽  
Composite Layers ◽  
Composite Diamond

We have developed multilayer composite diamond coatings with improved adhesion and wear resistance on WC(Co) tool substrates. The coatings consist of a first layer of discontinuous diamond crystallites that are anchored to the WC(Co) substrate by an interposing layer of ceramic films. These films consist of TiC, TiN, SiC, Si3N4 or WC deposited to provide a conformal coverage on the first layer of diamond. A second or final layer of continuous diamond film is deposited to provide the cutting edge of the tool. The diamond film in the composite layers is deposited by hot filament chemical vapor deposition (HFCVD) and the interposing layer is deposited by laser physical vapor deposition (LPVD). The different parameters associated with the deposition of diamond and interposing layers are optimized to improve the adhesion and wear resistance. We have studied the adhesion characteristics by indentation tests in which the critical load for peeling of the diamond films is determined. Adhesion and wear resistance of the films are also tested using an overlap polishing on diamond paste with 5–6 μm particle size. The diamond and interposing layers in the composite are characterized by scanning electron microscopy and Raman spectroscopy. Results of improvement in adhesion and wear resistance are correlated with the quality of the diamond film and the interposing layer. Better accommodation of thermal stresses and strains in the composite layers has been shown to be responsible for improvement in the adhesion and wear resistance of the composite diamond films.

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