Residual Stresses in Single and Multilayer Composite Diamond Coatings
Keyword(s):
X Ray
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ABSTRACTResidual stresses were measured in different types of diamond coatings deposited onto molybdenum substrates by hot filament chemical vapor deposition. The types of coatings examined include a continuous single layer diamond coating and a continuous multilayer diamond composite coating with an aluminum nitride embedding layer. The stresses were determined by X-ray diffraction and Raman spectroscopy and compared.