Electromigration in Sputter Deposited Copper/Zirconium Alloys

MRS Proceedings ◽

10.1557/proc-563-115 ◽

1999 ◽

Vol 563 ◽

Author(s):

N. D. McCusker ◽

N. D. McCusker ◽

B. M. Armstrong

Keyword(s):

Zirconium Alloy ◽

Surface Segregation ◽

Zirconium Alloys ◽

Copper Surface ◽

Copper Films ◽

Alloy Films ◽

Damage Process ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

AbstractRF-magnetron sputter deposited copper/zirconium alloy films have been characterised in terms of resistivity, composition, microstructure, texture and stress. The properties and electromigration reliability of these alloys have been compared to those of pure sputtered copper films. The surface segregation of zirconium within the films after annealing has been studied. We have proposed a mechanism in which zirconium at the copper surface can influence the electromigration damage process, enhancing reliability.

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Adhesion properties of a three-layer system based on RF-magnetron sputter deposited calcium-phosphate coating and silver nanoparticles

2016 11th International Forum on Strategic Technology (IFOST) ◽

10.1109/ifost.2016.7884197 ◽

2016 ◽

Author(s):

M. S. Tkachev ◽

E. S. Melnikov ◽

M. A. Surmeneva ◽

A. A. Sharonova ◽

R. A. Surmenev ◽

...

Keyword(s):

Silver Nanoparticles ◽

Calcium Phosphate ◽

Calcium Phosphate Coating ◽

Phosphate Coating ◽

Layer System ◽

Adhesion Properties ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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High-bias current voltage temperature characteristics of undoped rf magnetron sputter deposited boron carbide (B5C)/p-type crystalline silicon heterojunctions

Semiconductor Science and Technology ◽

10.1088/0268-1242/18/1/302 ◽

2002 ◽

Vol 18 (1) ◽

pp. 7-22 ◽

Author(s):

M M Abdul-Gader Jafar

Keyword(s):

Boron Carbide ◽

Crystalline Silicon ◽

Bias Current ◽

Current Voltage ◽

High Bias ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Silicon Heterojunctions ◽

Sputter Deposited ◽

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Physical properties of rf magnetron sputter deposited NiO:WO3thin films

Materials Research Express ◽

10.1088/2053-1591/2/1/016401 ◽

2014 ◽

Vol 2 (1) ◽

pp. 016401 ◽

Author(s):

K S Usha ◽

R Sivakumar ◽

C Sanjeeviraja ◽

M Ichimura

Keyword(s):

Physical Properties ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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Ab initio calculations and a scratch test study of RF-magnetron sputter deposited hydroxyapatite and silicon-containing hydroxyapatite coatings

Surfaces and Interfaces ◽

10.1016/j.surfin.2020.100727 ◽

2020 ◽

Vol 21 ◽

pp. 100727

Author(s):

R.A. Surmenev ◽

I.Yu. Grubova ◽

E. Neyts ◽

A.D. Teresov ◽

N.N. Koval ◽

...

Keyword(s):

Ab Initio Calculations ◽

Ab Initio ◽

Scratch Test ◽

Hydroxyapatite Coatings ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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Effect of oxygen partial pressure in deposition ambient on the properties of RF magnetron sputter deposited Gd_2O_3 thin films

Applied Optics ◽

10.1364/ao.56.006114 ◽

2017 ◽

Vol 56 (22) ◽

pp. 6114 ◽

Author(s):

S. Maidul Haque ◽

Rajnarayan De ◽

S. Tripathi ◽

C. Mukherjee ◽

A. K. Yadav ◽

...

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited ◽

Effect Of Oxygen

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Properties of Rf Magnetron Sputter Deposited Cobalt Oxide Thin Films as Anode for Hydrogen Generation by Electrochemical Water Splitting

ECS Transactions ◽

10.1149/1.2357215 ◽

2019 ◽

Vol 3 (5) ◽

pp. 261-266 ◽

Author(s):

William B. Ingler ◽

Dinesh Attygalle ◽

Xunming Deng

Keyword(s):

Cobalt Oxide ◽

Water Splitting ◽

Hydrogen Generation ◽

Oxide Thin Films ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited ◽

Electrochemical Water Splitting

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Surface characterisation of the evolving nature of radio frequency (RF) magnetron sputter deposited calcium phosphate thin films after exposure to physiological solution

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.09.032 ◽

2006 ◽

Vol 200 (20-21) ◽

pp. 6002-6013 ◽

Author(s):

A.R. Boyd ◽

B.J. Meenan ◽

N.S. Leyland

Keyword(s):

Calcium Phosphate ◽

Radio Frequency ◽

Physiological Solution ◽

Surface Characterisation ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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RF-magnetron sputter deposited hydroxyapatite-based composite & multilayer coatings: A systematic review from mechanical, corrosion, and biological points of view

Ceramics International ◽

10.1016/j.ceramint.2020.09.274 ◽

2021 ◽

Vol 47 (3) ◽

pp. 3031-3053 ◽

Author(s):

Mir Saman Safavi ◽

Maria A. Surmeneva ◽

Roman A. Surmenev ◽

Jafar Khalil-Allafi

Keyword(s):

Systematic Review ◽

Multilayer Coatings ◽

Rf Magnetron Sputter ◽

Points Of View ◽

Magnetron Sputter ◽

Sputter Deposited

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Growth and Micro-Raman study of RF magnetron sputter deposited PbTiO3thin films

Ferroelectrics ◽

10.1080/00150199908015784 ◽

1999 ◽

Vol 232 (1) ◽

pp. 141-146 ◽

Author(s):

S. Srinivas ◽

S. Bhaskar ◽

Ram S. Katiyar

Keyword(s):

Raman Study ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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Effects of processing parameters on electroluminescence of rf magnetron sputter deposited ZnS:ErF3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2429679 ◽

2007 ◽

Vol 25 (2) ◽

pp. 225-231 ◽

Author(s):

David M. DeVito ◽

Avni A. Argun ◽

Evan Law ◽

Mark R. Davidson ◽

M. Puga-Lambers ◽

...

Keyword(s):

Processing Parameters ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

Sputter Deposited

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