Diffusion Barriers for Copper Metallization: Predicting Phase Stability and Reactivity using Equilibrium Thermodynamics

1999 ◽  
Vol 564 ◽  
Author(s):  
C. E. Ramberg ◽  
E. Blanquet ◽  
M. Pons ◽  
V. Ghetta ◽  
C. Bernard ◽  
...  
Keyword(s):  
Experimental Study ◽  
Thermodynamic Equilibrium ◽  
Phase Stability ◽  
Binary Systems ◽  
Amorphous Material ◽  
Electronic Conductivity ◽  
Diffusion Barriers ◽  
Copper Metallization ◽  
Equilibrium Thermodynamics ◽  
Preliminary Results

AbstractThe guidelines for designing a conductive, amorphous material, capable of thermodynamic equilibrium with copper, are defined using readily available thermodynamic information. The tradeoff between desired properties – equilibrium at the interfaces, amorphous microstructure, and electronic conductivity – are described, along with trends in relevant binary systems that result in these properties. These guidelines defined systems for experimental study, for which preliminary results are presented.

Application of equilibrium thermodynamics to the development of diffusion barriers for copper metallization (invited)

2000 ◽  
Vol 50 (1-4) ◽  
pp. 357-368 ◽  
Author(s):  
C.E Ramberg ◽  
E Blanquet ◽  
M Pons ◽  
C Bernard ◽  
R Madar
Keyword(s):  
Diffusion Barriers ◽  
Copper Metallization ◽  
Equilibrium Thermodynamics

Experimental study of flame balls in space - Preliminary results from STS-83

AIAA Journal ◽  
1998 ◽  
Vol 36 ◽  
pp. 1361-1368
Author(s):  
Paul D. Ronney ◽  
Ming-Shin Wu ◽  
Howard G. Pearlman ◽  
Karen J. Weiland
Keyword(s):  
Experimental Study ◽  
Preliminary Results

Experimental study of hydrothermal transformations scheelite ⇌ ferberite : preliminary results

1985 ◽  
Vol 108 (1) ◽  
pp. 15-20 ◽  
Author(s):  
Alain Baumer ◽  
Raoul Caruba ◽  
Bernard Guy
Keyword(s):  
Experimental Study ◽  
Preliminary Results

scholarly journals Ureteral reconstruction with abdominal wall muscle flap: experimental study in rabbits

2014 ◽  
Vol 41 (6) ◽  
pp. 455-456
Author(s):  
Nelson Alfred Smith ◽  
Paulo Cesar Silva ◽  
Manoel Luiz Ferreira ◽  
Alberto Schanaider
Keyword(s):  
Experimental Study ◽  
Surgical Technique ◽  
Abdominal Wall ◽  
Muscle Flap ◽  
Experimental Development ◽  
Preliminary Results ◽  
Ureteral Reconstruction ◽  
Abdominal Wall Muscle ◽  
Tubular Shape

The authors detail the experimental development of a technique for the reconstruction of the ureter using a tubular shape, muscle flap of the abdominal wall. the preliminary results indicate the feasibility of this surgical technique.

Readers’ Perceptions of Lexical Cohesion in Text

2013 ◽  
Author(s):  
Jane Morris
Keyword(s):  
Experimental Study ◽  
Individual Differences ◽  
Common Core ◽  
Etude Expérimentale ◽  
Semantic Relations ◽  
Lexical Resources ◽  
Lexical Cohesion ◽  
Preliminary Results ◽  
Lexical Semantic ◽  
Étude Expérimentale

Preliminary results from an experimental study of readers’ perceptions of lexical cohesion and lexical semantic relations in text are presented. Readers agree on a common “core” of groups of related words and exhibit individual differences. The majority of relations reported are “non-classical” (not hyponymy, meronymy, synonymy, or antonymy). A group of commonly used relations is presented. These preliminary results indicate potential for improving both relations existing in lexical resources, and methods dependent on lexical cohesion analysis.Les résultatspréliminaires d’une étude expérimentale sur les perceptions des lecteurs au sujet de la cohésion lexicale et des relations lexicales sémantiques de textes sont présentés. Les lecteurs s’entendent sur un « noyau » commun de groupes de mots reliés et présentent des différences individuelles. La majorité des relations indiquées sont « non classiques » (ni hyponymiques, méronymiques, synonymiques ou antonymiques). Un groupe de relations couramment utilisées est présenté. Ces résultats préliminaires indiquent le potentiel nécessaire pour améliorer aussi bien les relations existant dans les ressources lexicales que les méthodes dépendant de l’analyse de la cohésion lexicale. 

Optimization of Copper Top-Side Metallization for High Performance SiC-Devices

2013 ◽  
Vol 740-742 ◽  
pp. 801-804 ◽  
Author(s):  
Tim Behrens ◽  
Thomas Suenner ◽  
Eckart Geinitz ◽  
Andreas Schletz ◽  
Lothar Frey
Keyword(s):  
Leakage Current ◽  
High Performance ◽  
High Reliability ◽  
Diffusion Barriers ◽  
Copper Layer ◽  
Copper Metallization ◽  
Adhesion Promoters ◽  
Peel Tests

While aluminum-based metallization schemes on Si have been optimized for the last decades, only few investigations have been done on copper metallization with SiC-devices. Thus, in this work the mechanical as well as the electrical interactions of this metallization system have been analyzed and optimized for SiC-devices in high reliability applications. For optimizing the adhesion of the copper metallization stack on SiC devices, different metallization schemes consisting of adhesion promoters (Ti, Cr, Al, Ta, WTi), diffusion barriers (TiN, Ta, WTi), and the final copper layer have been tested by peel-tests. For investigating the electrical interactions TLM measurements as well as leakage-current measurements have been done on copper metalized SiC samples.

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