Wave Polymerization During Vapor Deposition of Porous Parylene-N Dielectric Films

AbstractParylene-N films vapor deposited near liquid nitrogen temperature (77 K) undergo a unique ‘wave’ polymerization process in which a rapidly moving reaction front is apparent as the film changes from translucent to optically opaque. This moving reaction front produces a highly porous polymer film. The porosity of these films is approximately 80%. By capturing the wave process on video we have quantified the moving ‘wave’ velocity, which averages 11 cm/s. Timeaveraged deposition rates of the resulting opaque, porous films are more than 8 μm/min. This rate is more than two orders of magnitude greater than the measured deposition rates of nonporous films that are deposited at higher temperatures, at otherwise fixed conditions of monomer delivery rate and deposition chamber pressure.

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Cryostructuration as a tool for preparing highly porous polymer materials

Polymer Chemistry ◽

10.1039/c1py00014d ◽

2011 ◽

Vol 2 (5) ◽

pp. 1059 ◽

Cited By ~ 58

Author(s):

Harald Kirsebom ◽

Bo Mattiasson

Keyword(s):

Porous Polymer ◽

Polymer Materials ◽

Highly Porous

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Ethanol steam reforming over Co Ru nanoparticles supported on highly porous polymer-based carbon material

Catalysis Communications ◽

10.1016/j.catcom.2019.105717 ◽

2019 ◽

Vol 128 ◽

pp. 105717 ◽

Cited By ~ 2

Author(s):

Mikhail N. Efimov ◽

Elena Yu. Mironova ◽

Andrey A. Vasilev ◽

Dmitriy G. Muratov ◽

Aleksey A. Averin ◽

...

Keyword(s):

Steam Reforming ◽

Carbon Material ◽

Porous Polymer ◽

Ethanol Steam Reforming ◽

Ru Nanoparticles ◽

Highly Porous ◽

Ethanol Steam

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Highly porous single ion conducting membrane via a facile combined “structural self-assembly” and in-situ polymerization process for high performance lithium metal batteries

Journal of Membrane Science ◽

10.1016/j.memsci.2021.119601 ◽

2021 ◽

pp. 119601

Author(s):

Qiyun Pan ◽

Shan Jiang ◽

Zhong Li ◽

Yisi Liu ◽

Yue Du ◽

...

Keyword(s):

Self Assembly ◽

High Performance ◽

In Situ Polymerization ◽

Polymerization Process ◽

Lithium Metal ◽

Lithium Metal Batteries ◽

Ion Conducting ◽

Highly Porous

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Tailoring mechanical properties of highly porous polymer foams: Silica particle reinforced polymer foams via emulsion templating

Polymer ◽

10.1016/j.polymer.2006.03.114 ◽

2006 ◽

Vol 47 (13) ◽

pp. 4513-4519 ◽

Cited By ~ 122

Author(s):

Kristina Haibach ◽

Angelika Menner ◽

Ronald Powell ◽

Alexander Bismarck

Keyword(s):

Mechanical Properties ◽

Silica Particle ◽

Porous Polymer ◽

Polymer Foams ◽

Reinforced Polymer ◽

Emulsion Templating ◽

Highly Porous

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Highly porous polymer nanofibrous aerogels cross-linked via spontaneous inter-fiber stereocomplexation and their potential for capturing ultrafine airborne particles

Polymer ◽

10.1016/j.polymer.2019.121649 ◽

2019 ◽

Vol 179 ◽

pp. 121649 ◽

Cited By ~ 2

Author(s):

Xiu Yun Daphne Ma ◽

Jia Ming Ang ◽

Youfang Zhang ◽

Zhihui Zeng ◽

Chenyang Zhao ◽

...

Keyword(s):

Airborne Particles ◽

Porous Polymer ◽

Highly Porous

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Investigation of CF3I as an Environmentally Benign Dielectric Etchant

Journal of Materials Research ◽

10.1557/jmr.1998.0368 ◽

1998 ◽

Vol 13 (9) ◽

pp. 2643-2648 ◽

Cited By ~ 7

Author(s):

R. A. Levy ◽

V. B. Zaitsev ◽

K. Aryusook ◽

C. Ravindranath ◽

V. Sigal ◽

...

Keyword(s):

Flow Rate ◽

Gas Flow ◽

Processing Parameters ◽

Reaction Chamber ◽

Utilization Efficiency ◽

Environmentally Benign ◽

Dielectric Films ◽

Chamber Pressure ◽

Rf Power ◽

Exhaust Stream

In this study, trifluoroiodomethane (CF3I), a non-global-warming gas, has been investigated as a substitute for typical PFC's currently used in wafer patterning and CVD chamber cleaning processes. Dielectric films consisting of plasma enhanced chemically vapor deposited silicon dioxide and silicon nitride were comparatively etched in CF3I and C2F6/O2 plasma environments. The etch rate of these films was ascertained as a function of applied rf power, etchant gas flow rate, reaction chamber pressure, and CF3I: O2 ratio. Destruction efficiencies of CF3I at different processing parameters were evaluated. Depending on the flow rate, rf power, and chamber pressure, utilization efficiency of CF3I varied from as low as 10% to as high as 68%. CF4, C2F6, COF2, and CO2 were the predominant by-products found in the exhaust stream; however, their concentrations were very low compared to the traditional process employing C2F6/O2 mixtures.

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Highly Porous Polymer Structures Fabricated via Rapid Precipitation from Ternary Systems

Industrial & Engineering Chemistry Research ◽

10.1021/acs.iecr.7b02786 ◽

2017 ◽

Vol 56 (40) ◽

pp. 11451-11459 ◽

Cited By ~ 6

Author(s):

Ehsan Rezabeigi ◽

Robin A. L. Drew ◽

Paula M. Wood-Adams

Keyword(s):

Ternary Systems ◽

Porous Polymer ◽

Highly Porous

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Preparation Method of Porous Dressing Materials Based on Butyric-Acetic Chitin Co-Polyesters

Materials ◽

10.3390/ma11122359 ◽

2018 ◽

Vol 11 (12) ◽

pp. 2359 ◽

Cited By ~ 1

Author(s):

Zbigniew Draczynski ◽

Beata Kolesinska ◽

Ilona Latanska ◽

Witold Sujka

Keyword(s):

Tensile Strength ◽

Final Stage ◽

Preparation Method ◽

Solvent Mixture ◽

Porous Films ◽

Highly Porous Materials ◽

Solid Form ◽

Dressing Materials ◽

Highly Porous

A method for obtaining highly porous materials in the form of film, based on the butyric-acetic chitin co-polyesters, containing 90% of butyryl and 10% of acetyl groups, was developed. The highly porous films, with thickness up to 0.11 mm, were obtained by two methods: (a) pouring 5% BAC 90/10 solution in ethanol on the layer of solid salts (porophor agent) which after solidification was eluted with water; (b) application of the suspension of porophor agent in BAC 90/10 solution in the solvent mixture with density similar to bulk porophor agent. In the final stage, the materials were obtained with porosity up to 95–99% and tensile strength 5 cN, which can be used as an active layer of medical dressings. The optimised procedure was used in the production of porous medical dressings (Medisorb) on an industrial scale. In the industrial method, NaCl was used as a porophor agent in the solid form and as a 3% solution in polymer. The final materials were characterised by porosity and other functional parameters at the level recommended for medical dressings. Medisorb series materials do not show in vitro cytotoxic activity.

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