Characterization of Recoiling Oxygen in Silicon by Double-Crystal X-Ray Diffraction, Tem and Monte Carlo Simulation

1986 ◽  
Vol 69 ◽  
Author(s):  
F. Cembali ◽  
A. M. Mazzone ◽  
M. Servidori

The widespread use of through-oxide implants in Si-MOS technology has prompted many studies to characterize the behaviour of oxygen recoiling from the passivating SiO2 layer into the Si substrate. These studies have given support for the idea that an anomalous formation of defects, which alter the profile of the implanted impurity and the mobility of the free carriers, is connected with the oxygen recoils.

2020 ◽  
Vol 50 (1) ◽  
pp. 53-67
Author(s):  
Fabio L. Melquiades ◽  
Sandro V. Santos ◽  
Fabio Lopes ◽  
Juan Villanueva ◽  
Jorge L. Ticona ◽  
...  

2005 ◽  
Vol 891 ◽  
Author(s):  
Tomohiko Takeuchi ◽  
Suzuka Nishimura ◽  
Tomoyuki Sakuma ◽  
Satoru Matumoto ◽  
Kazutaka Terashima

ABSTRACTBoronmonophosphide(BP) is one of the suitable materials for a buffer layer between the c-GaN(100) and Si(100) substrates. The growth of BP layer was carried out by MOCVD on Si(100) substrate of 2 inch in diameter. The growth rate was over 2 μm/h without any troubles such as the bowing or cracking. In addition, the thickness of BP epitaxial layer was uniform over a wide area. A careful analysis of x-ray diffraction suggested that the growth of BP epitaxial layer inherited the crystal orientation from Si(100) substrate. Cross-sectional TEM images showed some defects like dislocations near the interface between BP layer and Si substrate. The Hall effect measurements indicated that the conduction type of BP films grown on the both n-Si and p-Si substrates was n-type without impurity doping, and that the mobility and carrier concentrations were typically 357cm2/Vs and 1.5×1020cm−3(on n-Si) and 63cm2/Vs and 1.9×1019cm−3(on p-Si), respectively. In addition, c-GaN was grown on the substrate of BP/Si(100) by RF-MBE.


2001 ◽  
Vol 493 (1-3) ◽  
pp. 361-365 ◽  
Author(s):  
Yoshimichi Nakamura ◽  
Hiroshi Kawai ◽  
Yoshihide Yoshimoto ◽  
Masaru Tsukada

2004 ◽  
Vol 95 (10) ◽  
pp. 5494-5497 ◽  
Author(s):  
C. Schumacher ◽  
A. S. Bader ◽  
T. Schallenberg ◽  
N. Schwarz ◽  
W. Faschinger ◽  
...  

1995 ◽  
Vol 61 (3) ◽  
pp. 331-333 ◽  
Author(s):  
S. Fujii ◽  
Y. Nishibayashi ◽  
S. Shikata ◽  
A. Uedono ◽  
S. Tanigawa

1994 ◽  
Vol 340 ◽  
Author(s):  
Z. C. Feng ◽  
S. J. Chua ◽  
A. Raman ◽  
N.N. Lim

ABSTRACTA variety of Inl-xGaxAs, Inl-yAlyAs and Inl-x-yGaxAlyAs films have been grown on InP by molecular beam epitaxy. A comprehensive characterization was performed using Raman scattering, photoluminescence (PL), Fourier transform infrared (FTIR) spectroscopy and double crystal X-ray diffraction on these ternary and quaternary heterostructures with different compositions and growth conditions. The lattice matched and mismatched structures are studied. Our analyses show that the interface mismatch exerts an important influence on the optical properties of these heterostructures, and conversely that Raman, PL and FTIR can be used to probe the interface mismatch nondestructively.


1995 ◽  
Vol 61 (3) ◽  
pp. 331-333 ◽  
Author(s):  
S. Fujii ◽  
Y. Nishibayashi ◽  
S. Shikata ◽  
A. Uedono ◽  
S. Tanigawa

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