Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization

2003 ◽  
Vol 767 ◽  
Author(s):  
Ara Philipossian ◽  
Erin Mitchell
Keyword(s):  
Residence Time ◽  
Flow Rate ◽  
Surface Texture ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Chemical Mechanical Planarization ◽  
Operating Conditions ◽  
Utilization Efficiency ◽  
Slurry Flow ◽  
Slurry Flow Rate

AbstractThe residence time distribution of slurry in the pad-wafer interface was experimentally determined and used to calculate the slurry utilization efficiency (η) of the CMP process. Slurry utilization efficiency represents the percentage of slurry that actually participates in the polish by entering the region bounded between the wafer and the pad. Results show that η ranges from 2 to 22 percent, depending on operating conditions such as applied wafer pressure, relative pad wafer velocity, slurry flow rate and pad surface texture (i.e. type of pad grooving).

Effects of wetland depth and flow rate on residence time distribution characteristics

2004 ◽  
Vol 23 (3) ◽  
pp. 189-203 ◽  
Author(s):  
Jeff F. Holland ◽  
Jay F. Martin ◽  
Timothy Granata ◽  
Virginie Bouchard ◽  
Martin Quigley ◽  
...  
Keyword(s):  
Residence Time ◽  
Flow Rate ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Distribution Characteristics

scholarly journals Optimization of a Continuous Hybrid Impeller Mixer via Computational Fluid Dynamics

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
N. Othman ◽  
S. K. Kamarudin ◽  
M. S. Takriff ◽  
M. I. Rosli ◽  
E. M. F. Engku Chik ◽  
...  
Keyword(s):  
Fluid Dynamics ◽  
Computational Fluid Dynamics ◽  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Operating Conditions ◽  
Impeller Speed ◽  
Transient Condition ◽  
Experimental Investigations ◽  
Rushton Turbine

This paper presents the preliminary steps required for conducting experiments to obtain the optimal operating conditions of a hybrid impeller mixer and to determine the residence time distribution (RTD) using computational fluid dynamics (CFD). In this paper, impeller speed and clearance parameters are examined. The hybrid impeller mixer consists of a single Rushton turbine mounted above a single pitched blade turbine (PBT). Four impeller speeds, 50, 100, 150, and 200 rpm, and four impeller clearances, 25, 50, 75, and 100 mm, were the operation variables used in this study. CFD was utilized to initially screen the parameter ranges to reduce the number of actual experiments needed. Afterward, the residence time distribution (RTD) was determined using the respective parameters. Finally, the Fluent-predicted RTD and the experimentally measured RTD were compared. The CFD investigations revealed that an impeller speed of 50 rpm and an impeller clearance of 25 mm were not viable for experimental investigations and were thus eliminated from further analyses. The determination of RTD using ak-εturbulence model was performed using CFD techniques. The multiple reference frame (MRF) was implemented and a steady state was initially achieved followed by a transient condition for RTD determination.

Dispersion Number Studies in ChemicalMechanical Planarization

2003 ◽  
Vol 767 ◽  
Author(s):  
Ara Philipossian ◽  
Erin Mitchell
Keyword(s):  
Fluid Dynamics ◽  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Dispersion Model ◽  
Flow Behavior ◽  
Plug Flow ◽  
Operating Conditions ◽  
The Coefficient Of Friction ◽  
Dispersion Number

AbstractThis study explores aspects of the fluid dynamics of CMP processes. The residence time distribution of slurry under the wafer is experimentally determined and used to calculate the Dispersion Number (Δ) of the fluid in the wafer-pad region based on a dispersion model for non-ideal reactors. Furthermore, lubrication theory is used to explain flow behaviors at various operating conditions. Results indicate that at low wafer pressure and high relative pad-wafer velocity, the slurry exhibits nearly ideal plug flow behavior. As pressure increases and velocity decreases, flow begins to deviate from ideality and the slurry becomes increasingly more mixed beneath the wafer. These phenomena are confirmed to be the result of variable slurry film thicknesses between the pad and the wafer, as measured by changes in the coefficient of friction (COF) in the pad-wafer interface.

Mixing and Heat Transfer in Helical Capillary Flow Reactors With Alternating Bends

2014 ◽  
Author(s):  
Marius G. Gelhausen ◽  
Safa Kutup Kurt ◽  
Norbert Kockmann
Keyword(s):  
Heat Transfer ◽  
Chemical Reactions ◽  
Residence Time ◽  
Flow Rate ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Capillary Flow ◽  
Exothermic Reaction ◽  
Small Diameter ◽  
Wall Material

Capillary flow is often occurring in natural and technical systems. Due to small diameter channels, laminar flow is established, while heat transfer is high from large specific surface area. For chemical reactions, good mixing and a narrow residence time distribution are important for high selectivity and yield. To improve mixing and residence time distribution, several measures of bend flow, helical arrangements and curved capillaries are proposed in literature. This contribution describes the flow, residence time distribution, and its influence on chemical reactions in short helical, alternating reactor capillaries (SHARC). The influence of the number of bends between alternating coils on the residence time distribution is described for different capillary and coil diameter, coil length and flow rate in laminar regime. The residence time distribution is a good measure for axial mixing and dispersion, while the heat transfer is mainly affected by the flow rate. The SHARC device was built from polymer capillaries of fluorinated ethylene propylene (FEP, inner diameter of 0.38 and 0.75 mm) with high mechanical flexibility for bending and good chemical resistance. Despite of low heat conductivity of the wall material, volumetric heat transfer coefficients of more than 5 MW/m3K were measured in a water bath. A highly exothermic reaction with adiabatic temperature increase of more than 100 K could be operated without detecting reaction runaway.

scholarly journals Residence time distribution and flow pattern modeling of oilseeds in a pilot screw press

OCL ◽  
2020 ◽  
Vol 27 ◽  
pp. 65
Author(s):  
Laurine Bogaert ◽  
Houcine Mhemdi ◽  
Eugène Vorobiev
Keyword(s):  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Rotation Speed ◽  
Screw Press ◽  
Operating Conditions ◽  
Axial Dispersion ◽  
Experimental Methodology ◽  
Theoretical Approaches ◽  
The Press

Mechanical expression is widely applied for oil recovery from oilseeds using continuous screw presses. Despite significant recent advances in the field of press design and automation, it remains difficult to predict the press performances based on the theoretical approaches, and more experimental investigations are needed to clarify and characterize the seeds flow and expression behavior in the press. Residence Time Distribution (RTD) is a frequently used tool in chemical engineering to characterize the material flow by simple tracer tests. In this paper, we explore the feasibility of using RTD for the screw presses, in order to check the flow patterns homogeneity and identify the possible deviations depending on the press geometry and the operating conditions. Both theoretical modeling and experimental investigation are conducted for two different screw press designs (Reinartz and Olexa), and at the different rotation speeds. An original and reliable experimental methodology was developed by using erucic acid as tracer in the form of pulse injection and gas chromatography as detection method. Experimental results coupled with statistical calculations showed the influence of the screw geometry and the rotation speed on the seeds flow inside the press. The matter displacement was much faster and the experimental residence time was very close to the theoretical one indicating more homogeneity and less dispersion in the Olexa arrangement in comparison to the Reinartz arrangement. The higher variance observed at lower rotation speed (2.4 rpm) suggested the presence of flow defects like mixing and axial dispersion in the press. To complete the experimental work, axial dispersion model was applied, and allowed obtaining the valuable information, such as axial dispersion degree and distribution functions. Obtained results can be very useful to predict the performance of existing screw presses and design more efficient industrial equipments.

Residence time distribution studies on recycle reactor with recirculation

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Arghya Datta ◽  
Haripada Bhunia ◽  
Raj Kumar Gupta
Keyword(s):  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Operating Conditions ◽  
Bypass Flow ◽  
Runge Kutta Method ◽  
Recycle Reactor ◽  
Model Equations ◽  
Distribution Studies ◽  
Best Fit

Abstract Residence time distribution (RTD) experiments provide very important information about the performance of reactors. In the present work, RTD experiments were performed with varying recycle and recirculation rates to see their effect on mean residence time (MRT), flow bypassing and stagnant volume in the reactor. A computer program was developed to solve the model equations using fourth-order Runge–Kutta method. A low bypass flow (<5%) was observed from the experimental RTD curves obtained at different operating conditions. A change in the MRT from 1.2 to 1.8 h was observed at different recycle and recirculation rates. At maximum recycle and maximum recirculation, in the study ranges, a 37% stagnant volume (with exchange) was predicted. In the absence of recycle and recirculation, a 53% stagnant volume (with exchange) was predicted corresponding to the best fit of the experimental RTD data.

Physical and computational modelling of residence and flow development time in a large municipal disinfection clearwell

2010 ◽  
Vol 37 (6) ◽  
pp. 931-940 ◽  
Author(s):  
Xiaoli Yu ◽  
Kerry Anne Mazurek ◽  
Gordon Putz ◽  
Cory Albers
Keyword(s):  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Development Time ◽  
Transient Flow ◽  
Treatment Plant ◽  
Operating Conditions ◽  
Scale Model ◽  
Tracer Studies ◽  
Flow Development

In this study, a two-dimensional, depth-averaged computational model (River2DMix) was used to predict the flow pattern and residence time distribution for flow through the Calgary Glenmore Water Treatment Plant northeast clearwell. Results are compared to those from flow visualization and tracer studies in a 1 : 19 scale model of the clearwell, as well as tracer studies conducted at the plant. Tests were carried out for three flow rates that ranged from minimum to maximum operating conditions. A key observation in the physical model was that it was necessary to let the flow fully develop before starting a tracer test to determine the residence time distribution. This flow development time to achieve steady-state results was approximately 10.5 h at the minimum flow rate tested. Results also show that it was unnecessary to model the structural columns either in the simulation or the scale model for developed flow in this clearwell, although for undeveloped or transient flow conditions the columns were important to consider.

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