UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films
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ABSTRACTA novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SBT, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.
2001 ◽
Vol 21
(10-11)
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pp. 1517-1520
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2019 ◽
Vol 776
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pp. 259-265
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2006 ◽
Vol 16
(5)
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pp. 292-296
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1994 ◽
Vol 35
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pp. 129-139
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2014 ◽
Vol 6
(10)
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pp. 7180-7188
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