Deposition temperature and UV irradiation effects on the H2S sensing properties of Te thin films

2015 ◽  
Vol 119 (2) ◽  
pp. 659-665
Author(s):  
M. Manouchehrian ◽  
M. M. Larijani ◽  
S. M. Elahi ◽  
M. A. Moghri Moazzen
Keyword(s):  
Thin Films ◽  
Uv Irradiation ◽  
Deposition Temperature ◽  
Irradiation Effects ◽  
Sensing Properties

UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films

2004 ◽  
Vol 830 ◽  
Author(s):  
S. O'Brien ◽  
P. K. Hurley ◽  
G. M. Crean ◽  
J. Johnson ◽  
C. Caputa ◽  
...  
Keyword(s):  
Thin Films ◽  
Uv Irradiation ◽  
Material Properties ◽  
Thermal Processing ◽  
Deposition Temperature ◽  
Rapid Thermal Processing ◽  
Sample Material ◽  
Strontium Bismuth Tantalate ◽  
Novel Technique

ABSTRACTA novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SBT, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.

UV irradiation effects on the bonding structure and electrical properties of ultra low-k SiOC(–H) thin films for 45 nm technology node

2011 ◽  
Vol 11 (5) ◽  
pp. S109-S113 ◽  
Author(s):  
Chi Kyu Choi ◽  
Chang Young Kim ◽  
R. Navamathavan ◽  
Heang Seuk Lee ◽  
Jong-Kwan Woo ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Uv Irradiation ◽  
Irradiation Effects ◽  
Technology Node ◽  
Bonding Structure ◽  
Low K

Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO2 Thin Films

2011 ◽  
Vol 492 ◽  
pp. 300-303
Author(s):  
Fu Jian Ren ◽  
Yi Sun ◽  
Liang Huang ◽  
Yun Han Ling ◽  
Jia You Feng
Keyword(s):  
Thin Films ◽  
Deposition Temperature ◽  
Gas Sensing ◽  
X Ray Diffraction ◽  
Sensing Properties ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Gas Sensing Properties ◽  
Gas Response

Crystalline anatase TiO2thin films were obtained on glass substrates at 60°C, 75°C and 90°C, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO2thin films. The H2sensing properties of the TiO2thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO2thin films obtained at deposition temperature of 60°C exhibited the maximum H2gas response at 350°C, and the magnitude of the sensor signal and the response time for 500ppm H2was 1.25 and 17s, respectively.

UV irradiation effects on TiO2 thin films

2008 ◽  
Vol 5 (5) ◽  
pp. 1164-1167 ◽  
Author(s):  
M. Fernández-Rodríguez ◽  
V. J. Rico ◽  
A. R. González-Elipe ◽  
A. Álvarez-Herrero
Keyword(s):  
Thin Films ◽  
Uv Irradiation ◽  
Irradiation Effects ◽  
Tio2 Thin Films

Assessing simultaneous effect of Ar/O2 ratio and process pressure on ammonia sensing properties of reactive DC magnetron sputtered SnO2 thin films

2021 ◽  
Vol 286 ◽  
pp. 129239
Author(s):  
Rahul Prajesh ◽  
Ravindra Kumar Jha ◽  
Vikas Saini ◽  
Mohd Nahid ◽  
Vinay Goyal ◽  
...  
Keyword(s):  
Thin Films ◽  
Sensing Properties ◽  
Simultaneous Effect ◽  
Ammonia Sensing ◽  
Process Pressure ◽  
Sno2 Thin Films
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