The Influence of Discharge Parameters on the Surface and the Debited Volume to the EDM

2014 ◽  
pp. 29-36
Author(s):  
Sebhi A. ◽  
Braternitz V. ◽  
Markert F.
Keyword(s):  
Discharge Parameters

Investigation of discharge parameters in Xenon filled coaxial DBD tube

2011 ◽  
Author(s):  
U. N. Pal ◽  
P. Gulati ◽  
Niraj Kumar ◽  
M. Kumar ◽  
M. S. Tyagi ◽  
...  
Keyword(s):  
Discharge Parameters

Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films

1994 ◽  
Vol 247 (1) ◽  
pp. 15-23 ◽  
Author(s):  
K. Ellmer ◽  
F. Kudella ◽  
R. Mientus ◽  
R. Schieck ◽  
S. Fiechter
Keyword(s):  
Reactive Magnetron ◽  
Discharge Parameters

Study on Sputtering Characteristics of Ni80Cr20 Alloy Target

2007 ◽  
Vol 353-358 ◽  
pp. 1891-1894
Author(s):  
Zhi Yong He ◽  
Xiao Feng Wang ◽  
Ying Fan ◽  
Zhen Xia Wang ◽  
Xiao Ping Liu ◽  
...  
Keyword(s):  
Regression Analysis ◽  
Glow Discharge ◽  
Processing Parameters ◽  
Orthogonal Test ◽  
Real Output ◽  
Target Temperature ◽  
Alloy Target ◽  
Discharge Parameters ◽  
Sputtering Yield ◽  
Discharge Pressure

Sputtering rate Sr was proposed as an alternative parameter instead of sputtering yield Y to calibrate the sputtering ability of the target, defined as the mass loss of the target per unit time and sputtering current. The approach is more reliable for glow discharge processes since the intense backscattering effect was taken into consideration. The effects of processing parameters on Sr were investigated through orthogonal test, the results indicated that target temperature affects Sr obviously, and among the discharge parameters, the target voltage and discharge pressure were the governing factors. Through regression analysis, the sputtering rate Sr was expressed as a function of sputtering voltage and discharge pressure which could be used to evaluate or predict the real output of the sputtering target.

Sign in / Sign up

Export Citation Format

Share Document