Study on Sputtering Characteristics of Ni80Cr20 Alloy Target

2007 ◽  
Vol 353-358 ◽  
pp. 1891-1894
Author(s):  
Zhi Yong He ◽  
Xiao Feng Wang ◽  
Ying Fan ◽  
Zhen Xia Wang ◽  
Xiao Ping Liu ◽  
...  
Keyword(s):  
Regression Analysis ◽  
Glow Discharge ◽  
Processing Parameters ◽  
Orthogonal Test ◽  
Real Output ◽  
Target Temperature ◽  
Alloy Target ◽  
Discharge Parameters ◽  
Sputtering Yield ◽  
Discharge Pressure

Sputtering rate Sr was proposed as an alternative parameter instead of sputtering yield Y to calibrate the sputtering ability of the target, defined as the mass loss of the target per unit time and sputtering current. The approach is more reliable for glow discharge processes since the intense backscattering effect was taken into consideration. The effects of processing parameters on Sr were investigated through orthogonal test, the results indicated that target temperature affects Sr obviously, and among the discharge parameters, the target voltage and discharge pressure were the governing factors. Through regression analysis, the sputtering rate Sr was expressed as a function of sputtering voltage and discharge pressure which could be used to evaluate or predict the real output of the sputtering target.

Study on Corrosion Resistance and Mechanical Property of Welding HAZ Treated by Laser Surface Remelting

2013 ◽  
Vol 734-737 ◽  
pp. 2346-2350 ◽  
Author(s):  
Yan Li Li ◽  
Jia Rui Qi ◽  
Dan Feng Zhang ◽  
Ji Liu ◽  
Chao Li
Keyword(s):  
Mechanical Property ◽  
Corrosion Resistance ◽  
Corrosion Current ◽  
Processing Parameters ◽  
Electrochemical Analysis ◽  
Constructional Steel ◽  
Orthogonal Test ◽  
Laser Surface ◽  
Laser Remelting ◽  
Laser Surface Remelting

Welding is a main joint way of the alloy constructional steel. However, the welding HAZ is very sensitive to corrosion. In order to increase the corrosion resistance of the welding HAZ without reducing mechanical property of the parts simultaneously, the laser surface remelting was used to treat the welding HAZ in this study. According to the results of the orthogonal test, the optimized processing parameters were obtained. Based on the electrochemical analysis, the corrosion current of 30CrMnSi welding HAZ can be decreased by laser remelting technology. The corrosion resistance of the HAZ can be improved effectively. At the same time, the mechanical property of the treated welding HAZ was better compared with the untreated.

Control of the glow discharge parameters at low pressures by means of a transverse supersonic gas flow

2016 ◽  
Vol 54 (5) ◽  
pp. 632-638 ◽  
Author(s):  
A. I. Saifutdinov ◽  
B. A. Timerkaev ◽  
B. R. Zalyaliev
Keyword(s):  
Glow Discharge ◽  
Gas Flow ◽  
Discharge Parameters ◽  
Supersonic Gas Flow ◽  
Low Pressures

Optimization of Discharge Parameters for a Flat-Type Radio-Frequency Glow Discharge Source Coupled to a Quadrupole Mass Spectrometer System

1996 ◽  
Vol 50 (4) ◽  
pp. 454-466 ◽  
Author(s):  
Charles R. Shick ◽  
R. Kenneth Marcus
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Mass Spectrometer ◽  
Ion Beam ◽  
Source Parameters ◽  
Ionization Source ◽  
Radio Frequency Glow Discharge ◽  
Mass Spectrometer System ◽  
Discharge Parameters ◽  
Spectrometer System

A radio-frequency (rf)-powered glow discharge (GD) atomization/ionization source for nominally flat sample types (>6 mm o.d.) has been designed and coupled to a commercial GD mass spectrometer system, the VG GloQuad. This source was evaluated and optimized for conducting as well as nonconducting samples. A parametric study has been conducted on this rf-GDMS system with respect to discharge power, Ar flow (cell pressure), limiting orifice plate (anode) diameter, and ion sampling distance. Analytical characteristics under the optimized source parameters—including stabilization times (5 min for conducting samples, 60 min for nonconducting samples); repeatability (overall internal <2% RSD, overall external <8% RSD employing ion beam ratios); quantification; and detection limits—were evaluated for both conducting and nonconducting samples.

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